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  • PECVD SYSTEM

    Model:KJ-T1200PECVD

    Continuous Temp:

    Chamber/Tube size:

    Description:

    product description:
         This product is composed of RF power supply, gas proton flow control system, substrate temperature control system, and vacuum system. It is suitable for deposition of SiO2 and SiNx films from room temperature to 1200 °C, and can also realize TEOS source deposition and SiC film deposition. And liquid gas source deposition of other materials, especially suitable for the deposition of high-efficiency protective layer films on organic materials and non-damaged passivation films at specific temperatures.


    1.Kejia 1200℃ Tube Furnace Series:
    Power KW 8
    Outer shell Stainless steel
    Inner lining Two layers of Alumina fiber
    Heating element Resistance wire
    Power supply V AC 208-240V, Single Phase, 50/60 Hz
    Max. Temperature °C 1200 (2 hour)
    Working  Temperature °C 1100 (Continuous)
    Temperature Uniform °C ±1
    Max Heating & Cooling rate °C/S ≤15 (Suggestion)
    Tube Size mm Φ200×1400
    Tube material High quality quartz
    Heating zone size mm Φ250×300
    Constant Temp. zone Length mm 180
    Sealing Flanges
    Temp. Control 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
    Over temperature protection and alarm allows for operation without attendant(s).
    +/- 1 ºC temperature accuracy.
    Accuracy °C ±1
    Total weight Kg 100
    2.600W Plasma RF Power supply 
    Plasma RF Power
    supply 
     

     
    Output Power 5 -600W adjustable with ± 1% stability
    RF frequency 13.56 MHz ±0.005% stability
    Reflection Power 200W max.
    Matching Automatic
    RF Output Port 50 Ω, N-type, female
    Noise <50 dB.
    Cooling Air cooling.
    Power 220V, 50Hz
     
    pecvd furnace
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan