Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>

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ALD PECVD System
  • ALD PECVD System
  • ALD PECVD System
  • ALD PECVD System
  • ALD PECVD System
  • ALD PECVD System

    Model:KJ-PECVD

    Description:

    ALD PECVD System is a tube furnace with 80mm diameter alumina tube, vacuum pump and six channels mass flow meters gas flowing system. It can mix 1-6 types of gases for PECVD or diffusion. 

    Brief Introduction:  
    It is a tube furnace with 80mm diameter alumina tube, vacuum pump and six channels mass flow meters gas flowing system. It can mix 1-6 types of gases for PECVD or diffusion. 
     
    Technical Parameter:
    Model KJ-PECVD
    Part I: Standard Parts
     
    Tube Furnace
     
    Display LCD Touch Screen
     
    Continuous Woking Temp. ≤1100℃ for 1st zone
    ≤1100℃ for 2nd zone
    ≤1600℃ for 3rd zone
    Heating Rate Suggestion: 0~10℃/min
    Temperature Zone 220mm+220+220mm
    Heating Element Sic heater and MoSi2 heaters
    Thermocouple K type and B type
    Temperature Control Accuracy ±1℃
    Tube Size 80x1600mm (OD x minimum L) Approx.
    Material: alumina 
    Temperature Control PID automatic control via SCR power control
    Tilt function 0-15 degree
    (it is not suggested to work in tilt function at 1100C, since the MoSi2 heating element may broken easily. It will become soft at high temperature, pls be kindly noted.)
    Heating curves 30 steps programmable
    Vacuum Flange
     
    Stainless Steel vacuum flange with valve
    Right side flange is sliding type.
    And the flange will be water cooling type.
    Power 220V, 50 Hz, single phase at max. 8KW
     
    supply Plasma RF Power
     
     
    Power Range 0-300W(continuous adjustable)
    Control Mode Manual / PLC / PC232/485
    Working Frequency 13.56MHz
    Machine Protection DC overload protection, DC/amplifier over-temperature protection, reflected power protection, matching timeout protection
    RF Output Impedance Interface (50Ω) N-type, female
    Power Stability ≤ 1 W
    Maximum Reflected Power 200 W
    Harmonic Components ≤ d Bc -50
    Supply Voltage 187V - 253V
    Overall Efficiency ≧ % 70
    Cooling Method forced air cooling
     
    Vacuum Pump
     
    Molecular Pump System
     
    Ultimate vacuum:6.7*10-5 Torr.
    Include digital vacuum gauge 
       
    Mass Flow Meters (LCD Touch Screen) Six precision mass flow meters :
    MFC Accuracy is: ±1.5% F.S.
    MFC 1 for Ar : Gas flow range depends on customer’s requirement
    MFC 2 for N2 : Gas flow range depends on customer’s requirement
    MFC 3 for O2 : Gas flow range depends on customer’s requirement
    MFC 4 for C2H2: Gas flow range depends on customer’s requirement
    MFC 5 for CH4: Gas flow range depends on customer’s requirement
    MFC 6 for H2: Gas flow range depends on customer’s requirement
    (above flow range is only for reference, Pls confirm gas flow range before palce order. )
    One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually.
     
    LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:


    (this valve is not supplied by us)ALD valve
     
    Two ALD valves with pulse controller  (min 10 ms duration )
    And connect to touch screen 
    Liquid-Vapor Generator Automatic liquid vapor generator is included and connect to  ALD valve

    1.7MHZ ultrasonic Atomization
     
    Equipped with a 1.7MHz ultrasonic atomizer, the liquid can be atomized into liquid particles and introduced into a tube furnace.
    20VAC, 1.7MHz ultrasonic atomizer
    • The liquid tank comes standard with 316 stainless steel,and sealed with a fluorine rubber seal;
    • Atomization amount can be set from 1 to 8, and the amount of atomization can be controlled by adjusting the size of the gear;
    • It can realize two functions of continuous operation atomization and regular operation atomization. The timing can be adjusted from 30 minutes to 180 minutes (adjust the gear every 30 minutes).
    Liquid injection system • A standard set of liquid injection pumps for automatic liquid feeding
    • The syringe pump is equipped with a plastic syringe with a maximum volume of 60ml for holding liquids;
    • Syringe pump speed adjustment range:
    0.004ml / min—70ml / min
    Water Chiller Used to cool down water cooled flange and vacuum pump.
     
    Pls note: C2H2  CH4 and H2 are flammable gas,suggest customer to operate system in ventilation environment,and it is better to prepare gas alarm equipment at customer side.

     

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    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

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    Zhengzhou/Kejia

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