Two-Tube-Furnace PECVD System_Zhengzhou Kejia Furnace

Two-Tube-Furnace PECVD System

Model：KJ-T1200-S6018LC-H2

Description：

KJ-T1200-S6018LC-H2 Two-Tube-Furnace PECVD System consists of two tube furnaces, a four-channel gas-mixing unit with mass flow meters, a vacuum pump unit and a RF plasma source.

Range of Application:
PECVD system, by ionizing atom-containing gas with microwave or radio frequency, creates active plasma locally. Compared with traditional CVD system, it will react easily to deposit and form the expected thin film in low temperature. It widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc.

Parameters:

Product name	Two-Tube-Furnace PECVD System
Model	KJ-T1200-S6018LC-H2
Tube Furnace	Quantity	2
	Type	Railway type (1200mm Railway Length) Fast heating and cooling are available.
	Insulation layer	Alumina ceramic fiber
	Max. Temperature	1200℃
	Working Temperature	≤1100℃
	Outside Shell Temperature	≤45℃
	Heating Rate	20℃/min (Suggestion 10℃/min)
	Heating Zone Length	220mm (Single Zone)
	Heating Element	0Cr27Al7Mo2 resistance wire
	Temperature Sensor	K-type thermocouple
	Temperature Control Accuracy	±1℃
	Tube	Quartz tube Φ50, 60, 80, 100, 150mm available.
	Temperature Controller	PID automatic control with 30 programmable segments for precise control Touchscreen Control is available.
	Sealing	Flanges made of 304SS and silicon rubber rings Gas valve on left flange Vacuum angle valve with KF25 connector on the right flange Note: Standard flange, KF flange and hinge flange are available.
	Power Supply	Single phase, 220V, 50Hz.
	Power	Power 3kW
Vacuum pump unit	Vacuum pump (With movable box)	10pa with a mechanical vacuum pump 0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.
	Pressure Gauge	Inficon Digital Pressure Gauge with high accuracy Measurement Range 1×105--1×10-5Pa
Plasma RF Power Supply	Output Power Range	5-300W Adjustable 200w/300w/500w/1000w available.
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB
	Cooling	Fans
	Power	208-240VAC, Single Phase, 50/60Hz
Gas-Mixing Unit with mass flow meters	Four precise mass flow meters (0.02% accuracy) are installed to control gas flow rate with touchscreen control for easy operation. One gas mixing tank is installed on the bottom case. MFC 1: Gas flow range from 0~100 SCCM MFC 2: Control range from 0~200 SCCM MFC 3: Control range from 0~500 SCCM MFC 4: Control range from 0~500 SCCM Gas inlet fitting: four 1/4NPS. Gas outlet fitting: four 1/4NPS. Power: 185-220VAC 50/60Hz 5 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.
Certificate	ISO, CE.
Chiller (Optional)	Be used to cool the tube and vacuum pump.
Notes	Pressure higher than 1.02Mpa will break the tube. Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply. No vacuum condition is allowed when the temperature is higher than 1000℃. Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube. If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
Warranty	One year with lifetime technical support.