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  • High vacuum PECVD equipment


    Continuous Temp:

    Chamber/Tube size:


    product description:
       KeJia high vacuum PECVD equipment is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system is easy to add functions and can expand the functions of plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.

    Main features of PECVD system:

    1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.

    2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.

    3. The stress of the deposited film can be controlled by the frequency of the radio frequency power supply.

    4. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.

    5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).

    Main technical parameters of the equipment:

    product name

    High vacuum PECVD system

    Slide rail tube furnace part

    Product number


    Furnace tube size


    Furnace tube material

    Quartz tube

    Heating zone


    Operating temperature


    Maximum temperature


    Temperature control method

    K-type thermocouple

    way to control

    Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to use

    Temperature control accuracy


    Temperature control protection

    With over-temperature and burnout protection function

    Heating rate

    0-20ºC/min, recommended 10ºC/min

    Heating element

    Molybdenum resistance wire

    Operating Voltage

    AC 220V single-phase 50HZ (circuit voltage users can choose to customize)

    heating power


    Furnace material

    Alumina polycrystalline fiber

    Furnace structure

    The furnace body has a slide rail, which can realize rapid heating and cooling

    Flange joint

    Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed

    Sealing system

    The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.


    Stainless steel housing


    Auxiliary cooling fan

                         Vacuum system part


    Vacuum system

    The main parameters

    1. Using imported Agilent high vacuum molecular pump set, the ultimate vacuum degree can reach 10-3pa

    2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;

    3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracy

    Pneumatic system part


    Four-way mass flow meter

    The main parameters

    Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range:

    1. MFC 1-MFC4: 0-1000sccm adjustable

    2. A mixing tank

    3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;

    4. Air inlet and outlet: 3 in and 1 out

    Flow control: manual rotary adjustment

    Connection mode: double card sleeve connection

    Plasma power supply part


    500W plasma power supply

    Power range

    0-500W (continuously adjustable)

    working frequency


    Operating mode

    Continuous output

    RF output impedance interface

    N-type, female (50Ω)

    Power stability


    Maximum reflected power


    Power protection settings

    DC over current protection, power amplifier over temperature protection, reflected power protection

    Supply voltage/frequency

    Single-phase AC (187V-253V) 50-60HZ

    cooling method

    Wind cooling

    Overall size

    88X483X550 MM

    Total Weight



    ISO certification, CE certification

    After-sales service

    One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)


    Tel Number