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Position:Home > Products > CVD/PECVD System > PECVD Furnace System

High vacuum PECVD equipment

Model：KJ-T1200-S5030-H

Description：

KeJia high vacuum PECVD equipment is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc

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product description:
KeJia high vacuum PECVD equipment is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system is easy to add functions and can expand the functions of plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.

features

Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.
PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.
The stress of the deposited film can be controlled by the frequency of the radio frequency power supply.
PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.
Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).

Technical Parameters

product name	High vacuum PECVD system
Slide rail tube furnace part
Product number	KJ-T1200-S5030-H
Furnace tube size	Φ50mmX1600mm
Furnace tube material	Quartz tube
Heating zone	300mm
Operating temperature	1100°C
Maximum temperature	1200°C
Temperature control method	K-type thermocouple
way to control	Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to use
Temperature control accuracy	±1℃
Temperature control protection	With over-temperature and burnout protection function
Heating rate	0-20ºC/min, recommended 10ºC/min
Heating element	Molybdenum resistance wire
Operating Voltage	AC 220V single-phase 50HZ (circuit voltage users can choose to customize)
heating power	3KW
Furnace material	Alumina polycrystalline fiber
Furnace structure	The furnace body has a slide rail, which can realize rapid heating and cooling
Flange joint	Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed
Sealing system	The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.
case	Stainless steel housing
Optional	Auxiliary cooling fan
Vacuum system part
name	Vacuum system
The main parameters	1. Using imported Agilent high vacuum molecular pump set, the ultimate vacuum degree can reach 10-3pa2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracy
Pneumatic system part
name	Four-way mass flow meter
The main parameters	Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range:1. MFC 1-MFC4: 0-1000sccm adjustable2. A mixing tank3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;4. Air inlet and outlet: 3 in and 1 outFlow control: manual rotary adjustmentConnection mode: double card sleeve connection
Plasma power supply part
name	500W plasma power supply
Power range	0-500W (continuously adjustable)
working frequency	13.56MHZ+0.005%
Operating mode	Continuous output
RF output impedance interface	N-type, female (50Ω)
Power stability	≤2W
Maximum reflected power	70W
Power protection settings	DC over current protection, power amplifier over temperature protection, reflected power protection
Supply voltage/frequency	Single-phase AC (187V-253V) 50-60HZ
cooling method	Wind cooling
Overall size	88X483X550 MM
Total Weight	13.5KG
Certification	ISO certification, CE certification
After-sales service	One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)