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  • 1100℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC & Vacuum Pump


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-S-II is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

    System Structure

    • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature. ( Plasma generator is at the right side of Pic )
    • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.
    • Four-channel gas mixing station with MFCs provide precise control of gas delivery.
    • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you to sublimate solid precursors for the needs of Hybrid Physical-Chemical processing.
    Two-Zone Rotary Furnace
    • Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating.
    • Two PID temperature controllers with 30 segments programmable.
    • Input Power: 208 – 240 VAC, single phase at max. 1.5KW.
    • High purity Alumina fibrous insulation for max. energy saving.
    • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM.
    • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone.
    Plasma RF Power Supply
    • Output Power:           5 -300W adjustable with ± 5% stability.
    • RF frequency:           13.56 MHz ±0.005% stability.
    • Reflection Power:      100W max.
    • Matching:                  Automatic.
    • Power:                      208-240VAC, Single Phase, 50Hz.
    Evaporation Boat  
    • Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating 
    • 0.7ml alumina crucible with tungsten heating coil surrounded.
    • K type thermocouple inserted for accurate temperature measurement of the source material.
    • Working current: <= 30 A.
    Sealing Flanges
    • Standard:  2'' O.D Fused quartz processing tube, please click the pic on the left for details.
    • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use.
    Sealing Flanges
    • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube.
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines).
    Tube Rotation Speed
    • 0 - 5 RPM variable.
    Vacuum Pump & Gauge
    • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
    • KF25 adapter and stainless steel bellows are connected between the pump and tube flange.
    • 10E-2 Torr vacuum can be achieved inside the processing tube.
    • Note: Vacuum Gauge is available at additional cost

    MFC Gas Mixing Station
    • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically.
      • MFC 1: Gas flow range from 0~100 SCCM
      • MFC 2&3: Control range from 0~200 SCCM  
      • MFC 4: Control range from 0~500 SCCM
    • Gas inlet/outlet fittings: 6mm O.D tube fitting
    • Power: 208-240VAC 50/60Hz
    • Stainless steel needle valves for manually ON/OFF control of gas supply.
    • Large PLC touch screen control enables easy flow rate settings

    Temperature Control
    • Two heating zone design with an individual temperature controller.
    • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments.
    • Built-in overheating & broken thermocouple protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • Three K-type thermocouples (one for each zone).
    • RS485 Communications Port.
    • Optional:  
      • The furnace may be operated by PC by installing a control module.
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. 
    Dimensions & Weight
    • Furnace: 1400mm L x 600mm W x 1250mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H
    • Net weight: 400 Lbs.
    • Shipping Weight: 500lbs.
    Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
    Volumetric Feeder and Collector Tank (Optional) 
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. 
    • Note: contact us for customization details.

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