1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump

Model：KJ-1200X-II

Description：

KJ-1200X-II is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four

Specific Introduction:
KJ-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on the surface).

Parameters:

System Structure	0~25° adjustable tilt frame assists smooth powder loading/unloading Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity Four-channel gas mixing station with MFCs provide precise control of gas delivery The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing
Two-Zone Rotary Furnace	Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating Two PID temperature controllers with 30 segments programmable. High purity Alumina fibrous insulation for max. energy saving Gear DC motor drives quartz tube with variable speed 2 - 10 RPM The split cover enables faster cooling and easy operation Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone Constant temperature zone: 200 mm within ±1°C if two zones at the same temperature.
Plasma RF Power Supply	Output Power: 5 -300W adjustable with ± 1% stability. RF frequency: 13.56 MHz ±0.005% stability. Reflection Power: 100W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, Single Phase, 50/60Hz
Evaporation Boat	Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC) 0.7ml alumina crucible with tungsten heating coil surrounded. S type thermocouple inserts for accurate temperature measurement of the source material. 500W DC evaporation power supply with max. operating current @ 30Amps
Quartz Tube	Standard: 4'' O.D Fused quartz processing tube, please click the pic on the left for details One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
Sealing Flanges	A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.
Tube Rotation Speed	0 - 5 RPM variable
Furnace Tilt Angle	0~30°
Vacuum Pump & Gauge	High-Performance Dual Stage Vacuum Pump is included in the sale. KF25 adapter and stainless steel bellows are connected between pump and tube flange 10E-2 Torr vacuum can be achieved inside the processing tube Note: Vacuum Gauge is available at additional cost.
MFC Gas Mixing Station	Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. MFC 1: Gas flow range from 0~100 SCCM MFC 2&3: Control range from 0~200 SCCM MFC 4: Control range from 0~500 SCCM Gas inlet/outlet fittings: 6mm O.D tube fitting Power: 208-240VAC 50/60Hz Stainless steel needle valves for manual ON/OFF control of gas supply. Large PLC touch screen control enables easy flow rate settings
Temperature Control	Two heating zone design with individual temperature controller Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for Built-in overheating & broken thermocouple protection. Over-temperature protection and alarm allow for operation without attendant(s). +/- 1 ºC temperature accuracy. Three K-type thermocouples (one for each zone). RS485 Communications Port. Optional: The furnace may be operated by PC by installing a control module. If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems.
Volumetric Feeder and Collector Tank (Optional)	EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material.