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1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump



KJ-1200X-II is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four

Specific Introduction:
    KJ-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on the surface).

System Structure
  • 0~25° adjustable tilt frame assists smooth powder loading/unloading
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process
  • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity 
  • Four-channel gas mixing station with MFCs provide precise control of gas delivery
  • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing
Two-Zone Rotary Furnace

  • Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
  • Two PID temperature controllers with 30 segments programmable.
  • Input Power: 208 – 240VAC, a single phase at max. 2.5KW.
  • High purity Alumina fibrous insulation for max. energy saving
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
  • The split cover enables faster cooling and easy operation
  • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
  • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

Plasma RF Power Supply
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      100W max.
  • Matching:                  Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Evaporation Boat  

  • Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC)
  • 0.7ml alumina crucible with tungsten heating coil surrounded.
  • S type thermocouple inserts for accurate temperature measurement of the source material.
  • 500W DC evaporation power supply with max. operating current @ 30Amps
Quartz Tube
  • Standard:  4'' O.D Fused quartz processing tube, please click the pic on the left for details
  • One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
Sealing Flanges
  • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
  • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.
Tube Rotation Speed
  • 0 - 5 RPM variable
Furnace Tilt Angle
  • 0~30°
Vacuum Pump & Gauge
  • High-Performance Dual Stage Vacuum Pump is included in the sale.
  • KF25 adapter and stainless steel bellows are connected between pump and tube flange
  • 10E-2 Torr vacuum can be achieved inside the processing tube   
  • Note: Vacuum Gauge is available at additional cost.
MFC Gas Mixing Station 
  • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically.
    • MFC 1: Gas flow range from 0~100 SCCM
    • MFC 2&3: Control range from 0~200 SCCM  
    • MFC 4: Control range from 0~500 SCCM
  • Gas inlet/outlet fittings: 6mm O.D tube fitting
  • Power: 208-240VAC 50/60Hz
  • Stainless steel needle valves for manual ON/OFF control of gas supply.
  • Large PLC touch screen control enables easy flow rate settings

Temperature Control
  • Two heating zone design with individual temperature controller
  • Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for 
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. 
Volumetric Feeder and Collector Tank (Optional)

  • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating.
  • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. 
  • You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material.
Dimensions & Weight
  • Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H
  • Net weight: 400 Lbs.
  • Shipping Weight: 500lbs.
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).

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