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1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump
  • 1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump
  • 1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump
  • 1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump
  • 1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump
  • 1200℃ PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump

    Model:KJ-1200X-II

    Description:

    KJ-1200X-II is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four

    Specific Introduction:
        KJ-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on the surface).
    Parameters:

    System Structure
     
    • 0~25° adjustable tilt frame assists smooth powder loading/unloading
    • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process
    • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity 
    • Four-channel gas mixing station with MFCs provide precise control of gas delivery
    • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing
    Two-Zone Rotary Furnace

     
    • Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
    • Two PID temperature controllers with 30 segments programmable.
    • Input Power: 208 – 240VAC, a single phase at max. 2.5KW.
    • High purity Alumina fibrous insulation for max. energy saving
    • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
    • The split cover enables faster cooling and easy operation
    • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
    • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

    Plasma RF Power Supply
     
    • Output Power:           5 -300W adjustable with ± 1% stability.
    • RF frequency:           13.56 MHz ±0.005% stability.
    • Reflection Power:      100W max.
    • Matching:                  Automatic
    • RF Output Port:         50 Ω, N-type, female
    • Noise:                       <50 dB.
    • Cooling:                     Air cooling.
    • Power:                      208-240VAC, Single Phase, 50/60Hz
    Evaporation Boat  

     
    • Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC)
    • 0.7ml alumina crucible with tungsten heating coil surrounded.
    • S type thermocouple inserts for accurate temperature measurement of the source material.
    • 500W DC evaporation power supply with max. operating current @ 30Amps
    Quartz Tube
    • Standard:  4'' O.D Fused quartz processing tube, please click the pic on the left for details
    • One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
    Sealing Flanges
      
    • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.
    Tube Rotation Speed
    • 0 - 5 RPM variable
    Furnace Tilt Angle
    • 0~30°
    Vacuum Pump & Gauge
     
    • High-Performance Dual Stage Vacuum Pump is included in the sale.
    • KF25 adapter and stainless steel bellows are connected between pump and tube flange
    • 10E-2 Torr vacuum can be achieved inside the processing tube   
    • Note: Vacuum Gauge is available at additional cost.
    MFC Gas Mixing Station 
    • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically.
      • MFC 1: Gas flow range from 0~100 SCCM
      • MFC 2&3: Control range from 0~200 SCCM  
      • MFC 4: Control range from 0~500 SCCM
    • Gas inlet/outlet fittings: 6mm O.D tube fitting
    • Power: 208-240VAC 50/60Hz
    • Stainless steel needle valves for manual ON/OFF control of gas supply.
    • Large PLC touch screen control enables easy flow rate settings



    Temperature Control
     
    • Two heating zone design with individual temperature controller
    • Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for 
    • Built-in overheating & broken thermocouple protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • Three K-type thermocouples (one for each zone).
    • RS485 Communications Port.
    • Optional:  
      • The furnace may be operated by PC by installing a control module.
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. 
    Volumetric Feeder and Collector Tank (Optional)

                            
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. 
    • You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material.
    Dimensions & Weight
     
    • Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H
    • Net weight: 400 Lbs.
    • Shipping Weight: 500lbs.
    Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

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