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  • 1100℃ PECVD Rotary Furnace with Vacuum Pump


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-S-II-R is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) system. It consists of a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump. Such a system is an excellent tool for heat-treating inorganic compound powders with surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

    System Structure Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature
    Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.
    Note: Gas tank is not included
    Two-Zone Rotary Furnace
    • Working temp: 1100ºC Max (<1hrs), and 1000ºC for continuous heating
    • Two PID temperature controllers with 30 segments programmable
    • Input Power: 208 - 240 VAC, single phase at max. 1.5KW
    • High purity Alumina fibrous insulation for max. energy saving
    • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
    • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone
    Plasma RF Power Supply
    • Output Power: 5 -300W adjustable with ± 5% stability
    • RF frequency: 13.56 MHz ±0.005% stability
    • Reflection Power: 100W max.
    • Matching: Automatic
    • Power: 208-240VAC, Single Phase, 50Hz
    Sealing Flanges
    • Standard: 2'' O.D Fused quartz processing tube, please click the pic on the left for details
    • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use
    Sealing Flanges
    • A pair of 1'' O.D quick disconnect flange with KF25 port is installed on each end of the tube
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)
    Tube Rotation Speed
    • 0 - 5 RPM variable
    Vacuum Pump & Gauge
    Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs
    KF25 adapter and stainless steel bellows are connected between the pump and tube flange
    10E-2 Torr vacuum can be achieved inside the processing tube
    Note: Vacuum Gauge is available at additional cost

    Temperature Control
    • Two heating zone design with individual temperature controller
    • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments
    • Built-in overheating & broken thermocouple protection
    • Over-temperature protection and alarm allow for operation without attendant(s)
    • +/- 1 ºC temperature accuracy
    • Two K-type thermocouples (one for each zone)
    • RS485 Communications Port
    • Optional:  
      • The furnace may be operated by PC by installing a control module.
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. 
    Dimensions & Weight
    • Furnace: 1400mm L x 600mm W x 1240mm H (with lid opened)
    • Net weight: 400 lbs
    • Shipping Weight: 500lbs
    Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
    Volumetric Feeder and Collector Tank (Optional) 
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treatment.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of the processing tube to gather the fired powder without exposure to air.
    • Note: contact us for customization details

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