Powder PE-CVD System with Powder Feeding & Receiving

Model：KJ-1200X-III-PECVD

Description：

KJ-1200X-III-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition (R-PE-CVD) system which is designed fro powder surface coating to form core-shell structure particles at the relatively lower temperature.

Specific Introduction:
KJ-1200X-III-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition (R-PE-CVD) system which is designed fro powder surface coating to form core-shell structure particles at the relatively lower temperature. The automatic powder feeding and receiving system is built in for continuous powder coating. Temperature, plasma power, and 4 channel gas MFC is controlled by touch screen panel and laptop computer for easy operation.

Parameters:

System Structure	0~25° adjustable tilt frame assists smooth powder loading/unloading. Gear-driven tube rotation allows "blending" processing powders to achieve the best processing uniformity . Four-channel gas mixing station with MFCs provide precise control of gas delivery. Airtight powder feeder and receiver are included for continuous powder coating processing up to 1000 g.
Three-Zone Rotary Furnace	Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating . Three digital temperature controllers with 30 segments programmable and ±0.1 °C accuracy. The split cover enables faster cooling and easy operation. Three heating zones: 6"+ 12"+ 6", total 24" ( 609 mm). Constant temperature zone: 480 mm length ±2°C. Gear DC motor drives quartz tube with variable speed 2 - 10 RPM.
Plasma RF Power Supply	Output Power: 5 -300W adjustable with ± 1% stability. RF frequency: 13.56 MHz ±0.005% stability. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling.
Quartz Tube	One special designed 5'' O.D Fused quartz processing tube is included. Can be customized according to customer needs
Sealing Flanges	A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder and electrical delivery lines)
Tube Rotation Speed	0 - 5 RPM variable
Furnace Tilt Angle	0~30°
Vacuum Pump & Gauge	EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale KF25 adapter and stainless steel bellows are connected between pump and tube flange 10E-2 Torr vacuum can be achieved inside the processing tube Note: Vacuum Gauge is available at additional cost
MFC Gas Mixing Station	Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. MFC 1: Gas flow range from 0~100 SCCM MFC 2&3: Control range from 0~200 SCCM MFC 4: Control range from 0~500 SCCM Gas inlet/outlet fittings: 6mm O.D tube fitting Power: 208-240VAC 50/60Hz Stainless steel needle valves for manual ON/OFF control of gas supply. Large PLC touch screen control enables easy flow rate settings
Volumetric Feeder and Collector Tank	EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating with adjustable feeding speed 0 - 97 ml/minute. Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air.