Position:Home > Products > CVD/PECVD System > PECVD Furnace System
Powder PE-CVD System with Powder Feeding & Receiving
  • Powder PE-CVD System with Powder Feeding & Receiving
  • Powder PE-CVD System with Powder Feeding & Receiving
  • Powder PE-CVD System with Powder Feeding & Receiving
  • Powder PE-CVD System with Powder Feeding & Receiving
  • Powder PE-CVD System with Powder Feeding & Receiving

    Model:KJ-1200X-III-PECVD

    Description:

    KJ-1200X-III-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition (R-PE-CVD) system which is designed fro powder surface coating to form core-shell structure particles at the relatively lower temperature.

    Specific Introduction:
        KJ-1200X-III-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition (R-PE-CVD) system which is designed fro powder surface coating to form core-shell structure particles at the relatively lower temperature.  The automatic powder feeding and receiving system is built in for continuous powder coating.  Temperature, plasma power, and 4 channel gas MFC is controlled by touch screen panel and laptop computer for easy operation
    Parameters:


    System Structure

     
    • 0~25° adjustable tilt frame assists smooth powder loading/unloading
    • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces the needs for high-temperature process
    • Gear-driven tube rotation allows "blending" processing  powders to achieve the best processing uniformity 
    • Four-channel gas mixing station with MFCs provide precise control of gas delivery
    • Airtight powder feeder and receiver are included for continuous powder coating processing up to 1000 g.   

    Three-Zone Rotary Furnace
     
    • Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
    • Three digital temperature controllers with 30 segments programmable and +/-0.1 oC accuracy.
    • Input Power: 208 – 240VAC, a single phase at max. 4.0 KW.
    • The split cover enables faster cooling and easy operation
    • Three heating zones: 6"+ 12"+ 6",  total 24" ( 609 mm)
    • Constant temperature zone:  480 mm length +/-2ºC
    • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
    Plasma RF Power Supply
     
     
    • Output Power:           5 -300W adjustable with ± 1% stability.
    • RF frequency:           13.56 MHz ±0.005% stability.
    • Reflection Power:      100W max.
    • Matching:                  Automatic
    • RF Output Port:         50 Ω, N-type, female
    • Noise:                       <50 dB.
    • Cooling:                     Air cooling.
    • Power:                      208-240VAC, Single Phase, 50/60Hz
    Quartz Tube
    • One special designed 5'' O.D Fused quartz processing tube is included.                
    Sealing Flanges
      
    • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder and electrical delivery lines)
    Tube Rotation Speed
    • 0 - 5 RPM variable
    Furnace Tilt Angle
    • 0~30°
    Vacuum Pump & Gauge
     
    • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale
    • KF25 adapter and stainless steel bellows are connected between pump and tube flange
    • 10E-2 Torr vacuum can be achieved inside the processing tube   
    • Note: Vacuum Gauge is available at additional cost

    MFC Gas Mixing Station
      
    • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically.
      • MFC 1: Gas flow range from 0~100 SCCM
      • MFC 2&3: Control range from 0~200 SCCM  
      • MFC 4: Control range from 0~500 SCCM
    • Gas inlet/outlet fittings: 6mm O.D tube fitting
    • Power: 208-240VAC 50/60Hz
    • Stainless steel needle valves for manual ON/OFF control of gas supply.
    • Large PLC touch screen control enables easy flow rate settings
    Volumetric Feeder and Collector Tank 
                      
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating with adjustable feeding speed 0 - 97 ml/minute.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air.
    Dimensions & Weight
     
    • Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H; the measurement is measured approximately.
    • Net weight: 400 Lbs.
    • Shipping Weight: 500lbs.
    Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan