Position:Home > Products > CVD/PECVD System > PECVD Furnace System
  • 1200℃ Max Two-Zone PECVD Tube Furnace (50 mm OD) with Pre-Heater and Auto-Sliding


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-II-50 is a dual-zone PE-CVD tube furnace system which consists of 300W RF plasma source, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire and for CVD coating of a wide range of material with the following benefits:

    • Lower temperature processing is required compared to the conventional CVD
    • High heating & cooling rate using a sliding furnace
    • Dual heating zone to create a thermal gradient up to 500ºC 
    • 1100ºC Max. the working temperature in the tube furnace
    • 1100ºC Max. the working temperature in pre-heater for heating vapor phase or evaporating solid materials
    • Rapid cooling & Heating for growing 2D  materials
    Dual Zone Split Tube furnace 

    • Max 1100ºC for continuous heating
    • Two programmable precision digital temperature controllers with 30 segments.
    • Two separate controlled Heating Zones
      • 200mm length for each heating zone
      • 400mm total in heating length
      • 250mm constant central temperature heating area if both zones were heated at the same temperature
      • 500ºC max temperature difference between two zones with thermal blocks in between
    • Input power: 208 – 240V AC input, a single phase at max. 4KW

    Plasma RF Power Supply

    • Output Power:           5 -300W adjustable with ± 1% stability.
    • RF frequency:           13.56 MHz ±0.005% stability.
    • Reflection Power:       200W max.
    • Matching:                  Automatic
    • RF Output Port:         50 Ω, N-type, female
    • Noise:                       <50 dB.
    • Cooling:                     Air cooling.
    • Power:                      208-240VAC, Single Phase, 50/60Hz
    Pre-heating furnace
    • Small tube furnace with 200mm length single heating zone
    • Max. temperature:  1100ºC
    • 30 segment programmable temperature control
    • The vapor goes through the heater first before getting in the RF Plasma generator.
    • It can put solid material in the heater for evaporation and mixing with the vapor phase.
    • Quartz Tube:   50mm OD x 44mm ID x 2200 mm L   ( 80mm OD tube is available at extra cost)
    • Vacuum flange:  included 
    Anti-corrosive Pressure Gauge
    • 3.8x10-5 to 1125 Torr measurement range
    • Anti-corrosive, gas-type independent 
    • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
    • Fast atmospheric detection eliminates waiting time and shortens process cycle
    • Easy to exchange plug & play sensor element
    Oil-less Vacuum Pump Station and Valves
    Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy-duty mobile cart
    KF25 adapter and stainless steel pipe are connected between the pump and tube flange with precision ball valve for customer's plug and play
    10E-2 Torr vacuum can be achieved inside the processing tube
    Sliding mechanism
    • Sliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.
    • Sliding speed is adjustable from  0-70 mm/s

    Heating & Cooling Rates
    • RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)
    • In order to achieve Max.heating rate,  the user must preheat furnace to the desired temperature, then slide the furnace to the sample zone of the tube
    • In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone

    • Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control the gas flow rate automatically with the system.

    Overall Dimensions
    Furnace: 550 x 380 x 520  mm 
    Sliding Rail: dual rail with 1750 mm length
    Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
    Net weight: 220 Lbs.
    Shipping Weight: 1200lbs.
    Warranty One year limited warranty with lifetime support 

    Tel Number