1200℃ Max. Slidable Multi Zone PECVD Furnace

Model：KJ-1200X-II

Description：

KJ-1200X-II is a multi-zone slidable PE-CVD tube furnace system consists of 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump.

Specific Introduction:
KJ-1200X-II is a multi-zone slidable PE-CVD tube furnace system consists of 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits:

Lower temperature processing compared to conventional CVD
High heating & cooling rate using a sliding furnace
Each heating zone to create a thermal gradient up to 200ºC
1100ºC Max. working temperature
Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single-layer graphene

Parameters:

Model	KJ-1200X-II-50	KJ-1200X-II-80	KJ-1200X-III-5
Tube Size (Pls select in options bar)	2" (50mm) OD x 1.7" ID x 71" Length	3.14" (80mm) OD x 2.83" ID x 71'' Length	5" (130mm) OD x 4.8" ID x 79'' Length
Furnace	OTF-1200X-II-50	OTF-1200X-II-80	OTF-1200X-III-S-130
Features	Two programmable precision temp. controllers with 30 segments. Two separately controlled Heating Zones: 200mm length for each heating zone 400mm total in heating length 250mm constant temperature heating area if both zones were heated at the same temperature	Two programmable precision temp. controllers with 30 segments. Two separately controlled Heating Zones: 200mm length for each heating zone 400mm total in heating length 250mm constant temperature heating area if both zones were heated at the same temperature	Three programmable precision temp. controllers with 30 segments. Three separately controlled Heating Zones: 200mm length for each heating zone 600mm total in heating length 480mm constant temperature heating area if all zones were heated at the same temperature
Furnace Structures	Split tube furnace with sliding rail Max 1100ºC for continuous heating Multi-programmable precision digital temperature controllers with 30 segments. Input power: 208 – 240V AC input, a single phase at max. 4KW
Plasma RF Power Supply	Output Power: 5 -300W adjustable with ± 1% stability. RF frequency: 13.56 MHz ±0.005% stability. Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, Single Phase, 50/60Hz
Anti-corrosive Pressure Gauge	3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element
Vacuum Pump Station and Valves	Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy-duty mobile cart KF25 adapter and stainless steel pipe are connected between the pump and tube flange with a ball valve for customer's plug and play 10E-2 Torr vacuum can be achieved inside the processing tube
Mass Flowmeters & Gas Mixing Station	It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. The LCD touch screen is integrated to provide easy control in the gas flow rate of each independent channel. Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1.5% FS Liner: ±（0.5-1.5）%F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 0~100 SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM
Heating & Cooling Rates	RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one to contact us ) In order to achieve Max.heating rate, the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube In order to achieve the Max. cooling rate, move the heated furnace from hot zone to cold zone
Overall Dimensions	2000mm L X 800mm W X 1500mm H
Shipping Weight & Dimension	Shipping Weight: 1500lbs Total 4 Pallets: 48"x40"x60" 48"x40"x40" 48"x40"x40" 81"x52"x40"
Warranty	One year limited warranty with lifetime support