Tel Number
180-3717-8440
Model:
Description:
The high vacuum RTP annealing furnace is a rapid heat treatment tubular furnace with a relatively high vacuum degree. It is equipped with a quartz cavity and a vacuum flange. It is heated by a halogen lamp. The heating speed can reach 50℃/second. It is au
1.Halogen heating element for fast heating. Replaceable heating element with long lifetime.
2.PID automatic control via SCR power control, programmable heating process.
3.Vacuum system and gas system are optional and can be customized according to customer needs.
4.Over temperature protection and alarm.
5.PID automatic control by SCR power control.
6.Accurate temperature control, RS485 interface and control software can control the operation of the furnace through a computer and display the temperature curve.
Processing wafer size:2 inches
Processing wafer size:4 inches
Processing wafer size:6 inches
Tube outer diameter | 100mm |
Heating zone | 200mm |
Max working temperature | 1000°C |
Controller | LED (Optional touch screen) |
Fiber liner | High purity alumina fiber |
Tube material | Quartz tube |
Heating rate | 0~50C/S |
Thermal couple | K Type |
Heating element | halogen lamp |
Max heating power | 18kW |
Power source | 380V 3P |
Optional functions | 1.vacuum system |
2.Gas system | |
Specific details can be customized according to customer needs. Welcome to inquire. |
|
One year (except wearing parts) |
Tube outer diameter | 110-150mm |
Heating zone | 300mm |
Max working temperature | 1000°C |
Controller | LED (Optional touch screen) |
Fiber liner | High purity alumina fiber |
Tube material | Quartz tube |
Heating rate | 0~50C/S |
Thermal couple | K Type |
Heating element | halogen lamp |
Max heating power | 24kW |
Power source | 380V 3P |
Optional functions | 1.vacuum system |
2.Gas system | |
Specific details can be customized according to customer needs. Welcome to inquire. |
|
One year (except wearing parts) |
Tube outer diameter | 180mm |
Heating zone | 400mm |
Max working temperature | 1000°C |
Controller | LED (Optional touch screen) |
Fiber liner | High purity alumina fiber |
Tube material | Quartz tube |
Heating rate | 0~50C/S |
Thermal couple | K Type |
Heating element | halogen lamp |
Max heating power | 24kW |
Power source | 380V 3P |
Optional functions | 1.vacuum system |
2.Gas system | |
Specific details can be customized according to customer needs. Welcome to inquire. |
|
One year (except wearing parts) |
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Tel Number
180-3717-8440
web@kejiafurnace.com
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