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RTP Rapid Annealing Furnace
  • RTP Rapid Annealing Furnace
  • RTP Rapid Annealing Furnace
  • RTP Rapid Annealing Furnace
  • RTP Rapid Annealing Furnace
  • RTP Rapid Annealing Furnace

    Model:

    Description:

    The high vacuum RTP annealing furnace is a rapid heat treatment tubular furnace with a relatively high vacuum degree. It is equipped with a quartz cavity and a vacuum flange. It is heated by a halogen lamp. The heating speed can reach 50℃/second. It is au


    Product Introduction:
    The high vacuum RTP annealing furnace is a rapid heat treatment tubular furnace with a relatively high vacuum degree. It is equipped with a quartz cavity and a vacuum flange. It is heated by a halogen lamp. The heating speed can reach 50℃/second. It is automatically controlled by PID. Designed for annealing semiconductor or solar cell substrates.
     
    This rapid heat treatment tubular furnace which not only has a very fast heating rate, but also directly moves the sample to room temperature after the sintering process is completed to achieve the physical state rapid cooling down. The equipment adopts the gas path structure of the inner tube inlet and the outer tube outlet, so that the reaction atmosphere can fully and evenly contact the processed samples.
     
    Applications:
    It is specially designed for the annealing of semiconductor or solar cell substrates. It is a common equipment for growing large-size two-dimensional graphene by CVD.

     
    rtp fast annealing furnace

    features
    • 1.Halogen heating element for fast heating. Replaceable heating element with long lifetime.

    • 2.PID automatic control via SCR power control, programmable heating process.

    • 3.Vacuum system and gas system are optional and can be customized according to customer needs.

    • 4.Over temperature protection and alarm.

    • 5.PID automatic control by SCR power control.

    • 6.Accurate temperature control, RS485 interface and control software can control the operation of the furnace through a computer and display the temperature curve.

    Technical Parameters

     

    Processing wafer size:2 inches

    Processing wafer size:4 inches

    Processing wafer size:6 inches

    Tube outer diameter 100mm
    Heating zone 200mm
    Max working temperature 1000°C
    Controller LED (Optional touch screen)
    Fiber liner High purity alumina fiber
    Tube material Quartz tube
    Heating rate 0~50C/S
    Thermal couple K Type
    Heating element halogen lamp
    Max heating power 18kW
    Power source 380V 3P
    Optional functions 1.vacuum system
    2.Gas system
    Specific details can be customized according to customer needs.
    Welcome to inquire.
    One year (except wearing parts)
    Tube outer diameter 110-150mm
    Heating zone 300mm
    Max working temperature 1000°C
    Controller LED (Optional touch screen)
    Fiber liner High purity alumina fiber
    Tube material Quartz tube
    Heating rate 0~50C/S
    Thermal couple K Type
    Heating element halogen lamp
    Max heating power 24kW
    Power source 380V 3P
    Optional functions 1.vacuum system
    2.Gas system
    Specific details can be customized according to customer needs.
    Welcome to inquire.
    One year (except wearing parts)
    Tube outer diameter 180mm
    Heating zone 400mm
    Max working temperature 1000°C
    Controller LED (Optional touch screen)
    Fiber liner High purity alumina fiber
    Tube material Quartz tube
    Heating rate 0~50C/S
    Thermal couple K Type
    Heating element halogen lamp
    Max heating power 24kW
    Power source 380V 3P
    Optional functions 1.vacuum system
    2.Gas system
    Specific details can be customized according to customer needs.
    Welcome to inquire.
    One year (except wearing parts)

     
    Optional function: Vacuum system and Gas system:
    rtp furnace

    rtp

     

    Inquiry

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    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan