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Position:![[!--oldtitle--]](/d/file/uploads/210512/1-210512151201352.jpg)
E-mail:
Tell:
Whatapp:+(86) 180-3717-8440
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
Tel Number
181-3719-5600
Technical Parameter:
| Model | KJ-PECVD | |
| Part I: Standard Parts | ||
|
Tube Furnace  |
Display | LCD touch screen |
| Chamber | Split type and upper part can be opened | |
| Max. Temperature | 1200℃ for short time | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 400mm | |
| Heating Element | Resistance wire with Mo | |
| Thermocouple | K type | |
|
Temperature Control Accuracy |
±1℃ | |
|
Tube Size |
OD60mm x 100mm x 60mm Tube Length :1600 mm |
|
Material: Quartz Tube |
||
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange |
Stainless Steel vacuum flange with valve, gas inlet and output port Magnetic fluid seal rotary joint  |
|
| Power |
220V, 50 Hz, single phase (or according to your requirements) |
|
| Customized Function |
Rotary and tilt Tilt angle: 0-30° (suggestion:0-15°) Tube rotation speed: 0-10r/min Communicate Port Control the temperature, mass flow rate, rotating speed and vacuum pump by computer. |
|
|
Plasma RF Power supply  |
Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
| Power | 220V, 50Hz | |
| Vacuum Pump System | Turbo Vacuum Pump |
Ultimate vacuum 2.7*10-3 Pa.
Model: GSP-5
Pumping speed: 6L/S
Input voltage: 500W
Rated Speed（rpm）: 1800
dB(A): 54
Model: FF-620F
Pumping speed: 600L/S
Rated speed(rpm): 27000
Bearing: Ceramic bearing Oil Filling: 150ml
The turbo vacuum pump will be designed into
a cart with wheel.
|
|
Four precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2&3: Gas flow range from 0~100 sccm
MFC 4: Gas flow range from 0~100sccm
One gas mixing tank is installed on bottom case with 4 stainless steel needle
valves is installed on left side of bottom case to control 4 type gases mixing
manually
|
Reference Photo:
