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High vacuum automatic rotary and tilt PECVD tube furnace



KJ-PECVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD. It widely used to product highquality SiO2 film, Si3N4 film, hard thin film, C


Technical Parameter:

Part I: Standard Parts
Tube Furnace

Display LCD touch screen
Chamber Split type and upper part can be opened
Max. Temperature 1200℃ for short time
Continuous Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
Temperature Zone 400mm
Heating Element Resistance wire with Mo
Thermocouple K type
Temperature Control
Tube Size
OD60mm x 100mm x 60mm
Tube Length :1600 mm
Material: Quartz Tube

Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valve, gas inlet and output port
Magnetic fluid seal rotary joint

Power 220V, 50 Hz, single phase
(or according to your requirements)
Customized Function Rotary and tilt
Tilt angle: 0-30° (suggestion:0-15°)
Tube rotation speed:  0-10r/min
Communicate Port
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
Plasma RF Power supply
Output Power 5 -500W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Power 220V, 50Hz
Vacuum Pump System Turbo Vacuum Pump
Ultimate vacuum 2.7*10-3 Pa.
Model: GSP-5
Pumping speed: 6L/S
Input voltage: 500W
Rated Speed(rpm): 1800
dB(A): 54
Model: FF-620F
Pumping speed: 600L/S
Rated speed(rpm): 27000
Bearing: Ceramic bearing Oil Filling: 150ml
The turbo vacuum pump will be designed into
a cart with wheel.
Four precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2&3: Gas flow range from 0~100 sccm
MFC 4: Gas flow range from 0~100sccm
One gas mixing tank is installed on bottom case with 4 stainless steel needle
valves is installed on left side of bottom case to control 4 type gases mixing
Reference Photo:

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