High vacuum automatic rotary and tilt PECVD tube furnace

Description：

KJ-PECVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD. It widely used to product highquality SiO2 film, Si3N4 film, hard thin film, C

Technical Parameter:

Model		KJ-PECVD
Part 1: Standard Parts
Tube Furnace	Display	LCD touch screen
	Chamber	Split type and upper part can be opened
	Max. Temperature	1200℃ for short time
	Continuous Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	400mm
	Heating Element	Resistance wire with Mo
	Thermocouple	N type
	Temperature Control Accuracy	±1℃
	Tube Size	OD60mm x 100mm x 60mm Tube Length :1600 mm
	Tube Size	Material: Quartz Tube.
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve, gas inlet and output port. Magnetic fluid seal rotary joint.
	Customized Function	Rotary and tilt Tilt angle: 0-30° (suggestion:0-15°) Tube rotation speed: 0-10r/min Communicate Port Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
Part 2: Plasma RF part
Plasma RF Power supply	Output Power	5 -500W adjustable with ± 1% stability
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max.
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB.
	Cooling	Air cooling.

Part 3: Vacuum system
Vacuum Pump System	Turbo Vacuum Pump	Ultimate vacuum 2.7*10-3 Pa. Pumping speed: 6L/S Input voltage: 500W Rated Speed（rpm）: 1800 dB(A): 54 Pumping speed: 600L/S Rated speed(rpm): 27000 Bearing: Ceramic bearing Oil Filling: 150ml The turbo vacuum pump will be designed into a cart with wheel.
		Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Gas flow range from 0~100 sccm MFC 4: Gas flow range from 0~100sccm One gas mixing tank is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually