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  • High vacuum automatic rotary and tilt PECVD tube furnace

    Model:KJ-PECVD

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Technical Parameter:

    Model KJ-PECVD
    Part I: Standard Parts
     
     
     
     
     
     
     
     
     
     
     
     
    Tube Furnace
     


     
     
     
     
     
     
     
     
     
     
     
     
     
    Display LCD touch screen
    Chamber Split type and upper part can be opened
    Max. Temperature 1200℃ for short time
    Continuous Woking Temp. ≤1100℃
    Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
    Temperature Zone 400mm
    Heating Element Resistance wire with Mo
    Thermocouple K type
    Temperature Control
    Accuracy
    ±1℃
     
     
     
     
    Tube Size
    OD60mm x 100mm x 60mm
    Tube Length :1600 mm
    Material: Quartz Tube
     


     
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Vacuum Flange Stainless Steel vacuum flange with valve, gas inlet and output port
     
    Magnetic fluid seal rotary joint


     
    Power 220V, 50 Hz, single phase
    (or according to your requirements)
    Customized Function Rotary and tilt
    Tilt angle: 0-30° (suggestion:0-15°)
    Tube rotation speed:  0-10r/min
     
    Communicate Port
    Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
     
     
     
     
     
     
     
    Plasma RF Power supply
     
    Output Power 5 -500W adjustable with ± 1% stability
    RF frequency 13.56 MHz ±0.005% stability
    Reflection Power 200W max.
    Matching Automatic
    RF Output Port 50 Ω, N-type, female
    Noise <50 dB.
    Cooling Air cooling.
    Power 220V, 50Hz
    Vacuum Pump System Turbo Vacuum Pump
    Ultimate vacuum 2.7*10-3 Pa.
    Model: GSP-5
    Pumping speed: 6L/S
    Input voltage: 500W
    Rated Speed(rpm): 1800
    dB(A): 54
    Model: FF-620F
    Pumping speed: 600L/S
    Rated speed(rpm): 27000
    Bearing: Ceramic bearing Oil Filling: 150ml
     
     
    The turbo vacuum pump will be designed into
    a cart with wheel.
       
    Four precision mass flow meters :
    MFC 1: Gas flow range from 0~100 sccm
    MFC 2&3: Gas flow range from 0~100 sccm
    MFC 4: Gas flow range from 0~100sccm
    One gas mixing tank is installed on bottom case with 4 stainless steel needle
    valves is installed on left side of bottom case to control 4 type gases mixing
    manually
     
    Reference Photo:




    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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