Position:Home > Products > CVD/PECVD System > PECVD Furnace System
  • High vacuum automatic rotary and tilt PECVD tube furnace


    Continuous Temp:

    Chamber/Tube size:


    Technical Parameter:

    Model KJ-PECVD
    Part I: Standard Parts
    Tube Furnace

    Display LCD touch screen
    Chamber Split type and upper part can be opened
    Max. Temperature 1200℃ for short time
    Continuous Woking Temp. ≤1100℃
    Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
    Temperature Zone 400mm
    Heating Element Resistance wire with Mo
    Thermocouple K type
    Temperature Control
    Tube Size
    OD60mm x 100mm x 60mm
    Tube Length :1600 mm
    Material: Quartz Tube

    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Vacuum Flange Stainless Steel vacuum flange with valve, gas inlet and output port
    Magnetic fluid seal rotary joint

    Power 220V, 50 Hz, single phase
    (or according to your requirements)
    Customized Function Rotary and tilt
    Tilt angle: 0-30° (suggestion:0-15°)
    Tube rotation speed:  0-10r/min
    Communicate Port
    Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
    Plasma RF Power supply
    Output Power 5 -500W adjustable with ± 1% stability
    RF frequency 13.56 MHz ±0.005% stability
    Reflection Power 200W max.
    Matching Automatic
    RF Output Port 50 Ω, N-type, female
    Noise <50 dB.
    Cooling Air cooling.
    Power 220V, 50Hz
    Vacuum Pump System Turbo Vacuum Pump
    Ultimate vacuum 2.7*10-3 Pa.
    Model: GSP-5
    Pumping speed: 6L/S
    Input voltage: 500W
    Rated Speed(rpm): 1800
    dB(A): 54
    Model: FF-620F
    Pumping speed: 600L/S
    Rated speed(rpm): 27000
    Bearing: Ceramic bearing Oil Filling: 150ml
    The turbo vacuum pump will be designed into
    a cart with wheel.
    Four precision mass flow meters :
    MFC 1: Gas flow range from 0~100 sccm
    MFC 2&3: Gas flow range from 0~100 sccm
    MFC 4: Gas flow range from 0~100sccm
    One gas mixing tank is installed on bottom case with 4 stainless steel needle
    valves is installed on left side of bottom case to control 4 type gases mixing
    Reference Photo:


    Tel Number