Tel Number
181-3719-5600
Model:KJ-PECVD
Continuous Temp:
Chamber/Tube size:
Model | KJ-PECVD | |
Part I: Standard Parts | ||
Tube Furnace |
Display | LCD touch screen |
Chamber | Split type and upper part can be opened | |
Max. Temperature | 1200℃ for short time | |
Continuous Woking Temp. | ≤1100℃ | |
Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
Temperature Zone | 400mm | |
Heating Element | Resistance wire with Mo | |
Thermocouple | K type | |
Temperature Control Accuracy |
±1℃ | |
Tube Size |
OD60mm x 100mm x 60mm Tube Length :1600 mm |
|
Material: Quartz Tube |
||
Temperature Control | PID automatic control via SCR power control | |
Heating curves | 30 steps programmable | |
Vacuum Flange |
Stainless Steel vacuum flange with valve, gas inlet and output port Magnetic fluid seal rotary joint |
|
Power |
220V, 50 Hz, single phase (or according to your requirements) |
|
Customized Function |
Rotary and tilt Tilt angle: 0-30° (suggestion:0-15°) Tube rotation speed: 0-10r/min Communicate Port Control the temperature, mass flow rate, rotating speed and vacuum pump by computer. |
|
Plasma RF Power supply |
Output Power | 5 -500W adjustable with ± 1% stability |
RF frequency | 13.56 MHz ±0.005% stability | |
Reflection Power | 200W max. | |
Matching | Automatic | |
RF Output Port | 50 Ω, N-type, female | |
Noise | <50 dB. | |
Cooling | Air cooling. | |
Power | 220V, 50Hz |
Vacuum Pump System | Turbo Vacuum Pump |
Ultimate vacuum 2.7*10-3 Pa.
Model: GSP-5
Pumping speed: 6L/S
Input voltage: 500W
Rated Speed(rpm): 1800
dB(A): 54
Model: FF-620F
Pumping speed: 600L/S
Rated speed(rpm): 27000
Bearing: Ceramic bearing Oil Filling: 150ml
The turbo vacuum pump will be designed into
a cart with wheel.
|
Four precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2&3: Gas flow range from 0~100 sccm
MFC 4: Gas flow range from 0~100sccm
One gas mixing tank is installed on bottom case with 4 stainless steel needle
valves is installed on left side of bottom case to control 4 type gases mixing
manually
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Tel Number
181-3719-5600
web@kejiafurnace.com
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