Tel Number
181-3719-5600
Model:KJ-T1200
Continuous Temp:
Chamber/Tube size:
Model | KJ-T1200 | |
Part I: Standard Parts | ||
Plasma RF Power Supply |
Output Power | 5 -500W adjustable with ± 1% stability |
RF frequency | 13.56 MHz ±0.005% stability | |
Reflection Power | 200W max. | |
Matching | Automatic | |
RF Output Port | 50 Ω, N-type, female | |
Noise | <50 dB. | |
Cooling | Air cooling. | |
Tube Furnace |
Display | LED |
Chamber | Split type and upper part can be opened | |
Continuous Woking Temp. | ≤1100℃ | |
Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
Temperature Zone | 500mm | |
Heating Element | Resistance wire with Mo | |
Thermocouple | K type | |
Temperature Control Accuracy | ±1℃ | |
Tube Size | 200mm OD X Length 1600 mm | |
Material: Quarz Tube |
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Temperature Control | PID automatic control via SCR power control | |
Heating curves | 30 steps programmable | |
Vacuum Flange |
Stainless Steel vacuum flange with valve |
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Power | 380V, 50 Hz, three phases at max.20KW | |
Vacuum Pump |
Rotary Vane Vacuum Pump Flow rate: 4L/S The rotary vane vacuum pump will be designed into a cart with wheel. |
|
Mass Flow Meters |
Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~100 sccm MFC 3: Gas flow range from 0~100 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually |
|
Digital Vacuum Gauge |
Pirani digital vacuum gauge |
Tel Number
181-3719-5600
web@kejiafurnace.com
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