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Position:
E-mail:
Tell:
Whatapp:
Address:No.18 Hongye Road,Hi-tech zone,Zhengzhou,China,450000
Tel Number
181-3719-5600
Brief Introduction:
KJ-T1200 PECVD is a is PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system which consists of 500W RF power supply, splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
KJ-T1200 PECVD is a is PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system which consists of 500W RF power supply, splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
| Model | KJ-T1200 | |
| Part I: Standard Parts | ||
| Plasma RF Power Supply | Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
Tube Furnace |
Display | LED |
| Chamber | Split type and upper part can be opened | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 500mm | |
| Heating Element | Resistance wire with Mo | |
| Thermocouple | K type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 200mm OD X Length 1600 mm | |
Material: Quarz Tube |
||
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange | Stainless Steel vacuum flange with valve |
|
| Power | 380V, 50 Hz, three phases at max.20KW | |
Vacuum Pump |
Rotary Vane Vacuum Pump Flow rate: 4L/S The rotary vane vacuum pump will be designed into a cart with wheel. |
|
| Mass Flow Meters | Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~100 sccm MFC 3: Gas flow range from 0~100 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually  |
|
| Digital Vacuum Gauge | Pirani digital vacuum gauge |
|
