KJ-T1200 PECVD System_Zhengzhou Kejia Furnace

KJ-T1200 PECVD System

Model：KJ-T1200

Description：

KJ-T1200 PECVD is a is PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system which consists of 500W RF power supply, splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing syste

Brief Introduction:
KJ-T1200 PECVD is a is PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system which consists of 500W RF power supply, splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.

Technical Parameter:

Model		KJ-T1200
Part I: Standard Parts
Plasma RF Power Supply	Output Power	5 -500W adjustable with ± 1% stability
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max.
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB.
	Cooling	Air cooling.
Tube Furnace	Display	LED
	Chamber	Split type and upper part can be opened
	Continuous Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	500mm
	Heating Element	Resistance wire with Mo
	Thermocouple	K type
	Temperature Control Accuracy	±1℃
	Tube Size	200mm OD X Length 1600 mm
	Tube Size	Material: Quarz Tube
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve
	Power	380V, 50 Hz, three phases at max.20KW
Vacuum Pump	Rotary Vane Vacuum Pump Flow rate: 4L/S The rotary vane vacuum pump will be designed into a cart with wheel.
Mass Flow Meters	Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~100 sccm MFC 3: Gas flow range from 0~100 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
Digital Vacuum Gauge	Pirani digital vacuum gauge