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Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Introduction
This aluminum nitride vacuum sintering furnace is a professional high-temperature vacuum integrated equipment specially developed for nitride advanced ceramic manufacturing. With a maximum working temperature of 1950℃ and ultimate vacuum up to ≤5Pa, it integrates vacuum degreasing and high-temperature sintering in one unit. Equipped with exclusive furnace cavity structure and optimized heater layout, the furnace realizes ±5℃ temperature uniformity and ±1℃ precise temperature control, effectively avoiding oxidation and contamination of non-oxide ceramic blanks during heating.
Adopting internationally advanced graphite heating elements and carbon felt thermal insulation materials, matched with tungsten-rhenium thermocouple and infrared dual temperature measuring system, it supports multiple processing modes including vacuum sintering, negative pressure degreasing sintering and carrier gas degreasing sintering. An optional independent degreasing system enables one-stop degreasing and sintering without workpiece transfer. The whole machine adopts fully automatic intelligent PLC control, which can automatically generate single-batch sintering curve reports. It features low leakage rate (pressure rising rate ≤0.67Pa/h), strong anti-pollution performance and efficient rapid cooling, with conventional cooling time ≤8h and fast cooling version within 3h. Multiple standardized specifications are available, and the effective heating zone size and loading capacity can be customized according to customers’ actual production process requirements, widely serving mass production and laboratory R&D of high-performance nitride ceramics.
Application
1. Aluminum nitride (AlN) series materials: aluminum nitride raw powder sintering, high thermal conductivity aluminum nitride ceramic substrates for power electronics packaging, HTCC packaging substrates, semiconductor heat dissipation substrates
2. Boron nitride (BN) products: boron nitride ceramic substrates, high-temperature resistant boron nitride structural parts, boron nitride crucibles and fixtures
3. Other nitride ceramic products: silicon nitride components, various non-oxide precision ceramic blanks and finished parts
4. High-temperature metal parts: high-temperature alloy engine blades, precision aerospace metal structural parts requiring vacuum sintering
5. Advanced ceramic industry: all kinds of nitride ceramic green body degreasing, densification sintering, low-pressure atmosphere sintering processes for electronic packaging, new energy, aerospace and semiconductor industries
