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Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production
  • Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production
  • Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production
  • Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production
  • Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production
  • Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production

    Model:KJ-T1200RTR-III-80-PE

    Description:

    The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in th

    Introduction
    The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.  

    1.Heating furnace
    Max. Temp 1200℃
    working temp ≤1100℃
    tube zie Φ80mm
    insulation material Alumina, high temperature fiber products
    thermocouple K type
    Temperature Accuracy ±1℃
    Temp. control · PID automatic control and auto-tune function.
    · 30 programmable segments for precise thermal processing.
    · Built-in protection for the over-heated and broken thermocouple. 
    Heating Zone Length 200+200+200mm
    Heating Element Fe-Cr-Alloy adopted by Mo
    power single phase,220V,50Hz

    2、PE system
    Power output range 0W~500W
    Maximum reflected power 100W
    RF output interface 50 Ω, N-type, female
    Power stability ≤5W
    Harmonic component ≤-50dbc
    Supply voltage Single-phase AC (187V-253V) Frequency 50/60HZ
    Overall efficiency >=70%
    Power Factor >=90%
    cooling method Forced air cooling

    3、Three-way proton flow control system
    Connector type Double ferrule stainless steel joint
    Standard range (N2) 200sccm,500sccm、1000sccm
    (Can be customized according to user requirements)
    Accuracy ±1.5%F.S
    Linear ±1%F.S
    Repeat accuracy ±0.2%F.S
    Response time Gas characteristics: 1~4 Sec, electrical characteristics: 10 Sec
    Working pressure range 0.1~0.5 MPa
    greatest pressure 3MPa
    interface Φ6,1/4''
    display 4-digit display
    Working temperature 5~45 high purity gas
    Pressure vacuum gauge -0.1~0.15 MPa, 0.01 MPa/div
    Shut-off valve Φ6
    Internal and external double throwing stainless steel pipe Φ6
     
    4、Low vacuum unit
    relative humidity ≤85%
    working environment 5℃~40℃
    Working voltage 220V±10%  50~60HZ
    power 1KW
    Pumping rate 10m³/h
    Ultimate vacuum 5X10-1Pa
    Working pressure range 1.01325X105~1.33X10-2Pa
    Withstand voltage 0.03MPa
    Oil capacity 1.1L
    Inlet port diameter KF25
    Exhaust port diameter KF25
    noise 50dB
    Connection method Using bellows, the manual flapper valve is connected to the bellows

     

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

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    Zhengzhou/Kejia

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