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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Introdution
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.heating system
2、RF generator
3、3 channels MFC
4、low vacuum unit
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.heating system
| max. temp | 1200℃ |
| working temp. | ≤1100℃ |
| tube size | Φ150mm |
| insulation material | Alumina, high temperature fiber products |
| thermocouple | K type |
| temp. accuracy | ±1℃ |
| temp. control | · PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple. |
| Heating Zone Length | 200+200+200mm |
| Heating Element | Fe-Cr-Al Alloy doped by Mo |
| power | single phase，220V，50Hz |
2、RF generator
| Power output | 0W~1000W |
| Maximum reflected power | 200W |
| RF output interface | 50 Ω, N-type, female |
| Power stability | ≤5W |
| Harmonic component | ≤-50dbc |
| voltage | single phase （187V-253V） 50/60HZ |
| Machine efficiency | >=70% |
| cooling | air cooling |
3、3 channels MFC
| Connector style | Double cutting ferrule stainless steel connector |
| Standard range(N2) | 200sccm，500sccm、1000sccm （optional） |
| Accuracy | ±1.5%F.S |
| Linearity | ±1%F.S |
| Repeat accuracy | ±0.2%F.S |
| Response time | gas：1～4 Sec，electricity：10 Sec |
| Working pressure range | 0.1～0.5 MPa |
| Max.pressure | 3MPa |
| Connector | Φ6,1/4'' |
| display | 4-digit display |
| Working temp. environment | 5~45High purity gas |
| Pressure vacuum gauge | －0.1～0.15 MPa, 0.01 MPa/grid |
| Shut-off valve | Φ6 |
| Internal and external Polished ss pipe | Φ6 |
4、low vacuum unit
| Relative air humidity | ≤85% |
| Working temp. environment | 5℃～40℃ |
| voltage | 380V |
| pumping rate | 32m³/h |
| ultimate vacuum | 5X10-1Pa（No-load & cold state） |
| Working pressure range | 1.01325X105～1.33X10-2Pa |
| Inlet diameter | KF40 |
| outlet diameter | KF40 |
| connetcing method | Use bellows, manual baffle valve connected to bellows |
