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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Main feature
Ø Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the thermal energy , so that the growth temperature of the graphene is reduced , and the process conditions are improved .
Ø Achieve growth of high quality graphene thin films by controlling nucleation and growth of graphene
Ø In this method, copper foil is used as a base, motor drives copper foil to move under closed growth condition, and then it passes through the first temperature zone (annealed area). Graphene will deposit on the copper foil on the second, third temperature zone (growth area)and tighten to the roll by the cooling device
Ø With the advantages of rapid cooling and continuous growth, and can be used for large-scale growth of graphene with large area and high quality.
Ø Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the thermal energy , so that the growth temperature of the graphene is reduced , and the process conditions are improved .
Ø Achieve growth of high quality graphene thin films by controlling nucleation and growth of graphene
Ø In this method, copper foil is used as a base, motor drives copper foil to move under closed growth condition, and then it passes through the first temperature zone (annealed area). Graphene will deposit on the copper foil on the second, third temperature zone (growth area)and tighten to the roll by the cooling device
Ø With the advantages of rapid cooling and continuous growth, and can be used for large-scale growth of graphene with large area and high quality.
Voltage |
Furnace input AC 208-240V ，50/60 Hz |
| Power | 6KW |
Working Temperature |
· Max. Temperature: 1200 °C · Continuous working temperature: 1100 °C |
Heating Zone |
· Heating Zone Length: 7.87" ( 200+200+200mm) · Constant Temperature Zone: 15.74 " (400mm. +/- 1ºC ) |
Heating Elements |
Fe-Cr-Al Alloy doped by Mo |
| Processing Tube | · High purity quartz tube: 100 mm OD x 1700 mm Length |
Copper foil width |
≤80mm |
Copper foil running rate |
8cm/min---50cm/min Adjustable |
RF Signal frequency |
13.56MHz±0.005%W |
Power output |
0-500W |
Vacuum Dgree |
10-1Pa |
Dimensions |
280*60*130cm |
| Application Note |
· Equipped with high precision mass flowmeter in the gas system,can control the gas flow · Gas can mix sufficient in required proportion in the static mixing chamber |
