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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Brief introdction:
Roll-to-roll PECVD is a plasma-enhanced chemical vapor deposition equipment (PECVD), and is equipped with a rewinding and unwinding device. This equipment can be used in the continuous heat treatment process of wire, such as carbon fiber preparation, alloy and other material wire modification treatment and other applications. It is also suitable for continuous growth of graphene on coils. The equipment includes five parts: roll-to-roll rewinding and unwinding movement module, 1200℃ dual temperature zone openable tube furnace module, PE plasma enhancement module, vacuum system and three-way proton flow meter gas supply system. The whole system can be used in vacuum/atmosphere. Work in a protected environment. The speed of the unwinding and unwinding mechanism is adjustable from 1 to 400mm/min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation to ensure that the speed of the sample is stable and not aliased, thereby ensuring the accuracy of the experiment
Technical parameters of roll-to-roll PECVD:
Roll-to-roll PECVD is a plasma-enhanced chemical vapor deposition equipment (PECVD), and is equipped with a rewinding and unwinding device. This equipment can be used in the continuous heat treatment process of wire, such as carbon fiber preparation, alloy and other material wire modification treatment and other applications. It is also suitable for continuous growth of graphene on coils. The equipment includes five parts: roll-to-roll rewinding and unwinding movement module, 1200℃ dual temperature zone openable tube furnace module, PE plasma enhancement module, vacuum system and three-way proton flow meter gas supply system. The whole system can be used in vacuum/atmosphere. Work in a protected environment. The speed of the unwinding and unwinding mechanism is adjustable from 1 to 400mm/min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation to ensure that the speed of the sample is stable and not aliased, thereby ensuring the accuracy of the experiment
Technical parameters of roll-to-roll PECVD:
| 1200℃ double temperature zone tube furnace |
Power supply voltage | AC220V，50Hz |
| *High power | 3KW | |
| Heating temperature zone | Double temperature zone 200mm+200mm | |
| Working temperature | ≤1200℃ | |
| Temperature control accuracy | ±1℃ | |
| Temperature control method | AI-PID 30-segment process curve, can store multiple | |
| Furnace tube material | high purity quartz | |
| Furnace tube size | φ80mm I.D x 1400mm L | |
| Sealing method | Stainless steel vacuum flange | |
| Vacuum measurement | resistance gauge | |
| Working gas | Hydrogen, nitrogen, argon, oxygen and other non-corrosive gases | |
| Vacuum pump | Bipolar rotary vane vacuum pump | |
| Ultimate vacuum degree | 10^-1Pa | |
| Three-way mass flow meter | Valve type | Stainless steel needle valve |
| Number of gas channels | Three channels | |
| Pressure range | 0.05~0.3MPa | |
| Range | 1~100 SCCM（Ar） 1~200 SCCM（H2） 1~500 SCCM (CH4) |
|
| Flow control range | ±1.5% | |
| Mixing tank volume | 750mL | |
| Gas path material | 304 stainless steel | |
| Pipe connection | 6.35mm ferrule joint | |
| Power supply | AC220V 50Hz | |
| S RF power supply | Output power | 500W |
| Output accuracy | ±1% | |
| RF frequency | 13.56MHz | |
| RF stability | ±0.005% | |
| Cooling method | Air cooling |
