Two Heating Zone Tube Furnace |
- Two heating zone with 440 mm length single heating zone and 250 mm length constant temperate zone
- 1200oC Max. working temperature for < 60 minutes
- 1100oC Max for continuous heating
- 30 segments programmable precision digital temperature controller with +/1ºC accuracy
- (Eurotherm 3000 Temperature controller is optional for +/- 0.1ºC accuracy)
- High purity quartz tube: 80mm OD x 72mm ID x 1400 mm Length 2.83"ID x 55'' Length
- 100 mm OD x 94mm ID tube is available as an option
- Three heating zone furnace is available as optional
|
R2R Vacuum Chambers |
- Two vacuum chambers are located in two ends of the furnace and connected with the quartz tube
- The reeling rollers for a substrate in and out are located inside the vacuum chamber
- Reeling speed for the substrate is adjustable from 1- 400mm/min
- Max. movable substrate: 65 mm Width for 80mm OD tube
- One roll of copper foil with 65 mm width and 0.025 mm thick (~5 kg) is included for customer practice
- 100mm OD tube is available upon request, which can feeding substrate with max. width 80 mm
- Roll to Roll mechanism with speed controller and sealed flange without furnace may available upon request.
|
Three Channel Gas Delivery Station |
- Working Temp.: 5~45 ºC
- Max. Pressure: 3x106 Pa
- Accuracy: ±1.5% FS
- Liner: ±(0.5-1.5)%F.S.
- Duplicate accuracy: ±0.2%F.S.
- Controlling Range:
- Controller 1: 0~100 SCCM (Ar gas calibration)
- Controller 2: 1~199 SCCM (H2 gas calibration)
- Controller 3: 1~499 SCCM (Methane calibration)
Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking. |
Vacuum Pump and valve |
- Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr.
- KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve
- Digital vacuum pressure gauge and display are installed with the furnace (Pic. 1)
- The oil-less pump (Pic. 2) and gas mixing & delivery system (Pic. 3) are available and PID pressure controlled vacuum system is available upon request at an extra cost
|
Anti-corrosive Pressure Gauge |
- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens process cycle
- Easy to exchange plug & play sensor element
|
Temperature Controller |
- Two temperature controllers with 30 programmable segments with +/- 1 ºC temperature accuracy
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection
- Over-temperature protection and alarm allow for operation without attendant(s)
- RS485 Communications Port with PC operation software
- You may upgrade the temperature controller to the Eurotherm Controller with 0.1 ºC accuracy with software
|
Control Panel |
- 7" touch screen control panel which will control temperature, gas flow rate, plasma power
- PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software)
|
Optional |
- We may upgrade the furnace to 5" Tube, and grow 4" width film
- The larger diameter tube up to 8" OD for the roll to roll CVD system is available upon request
|
Warranty |
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products page.) |