Large diameter vacuum atmosphere tube furnace

Introduction:
This equipment is a three-zone high-temperature tube furnace, specifically designed to meet the R&D and pilot-scale testing needs of cutting-edge fields such as semiconductors, nanomaterials, and graphene. Its core advantages lie in its ultra-long isothermal zone and large-diameter furnace tube, enabling simultaneous processing of multiple samples or large-area uniform heat treatment under the same temperature field, significantly improving experimental efficiency and consistency.

The system employs three independently controlled heating zones, utilizing precise PID programmable temperature control technology to create a stable isothermal zone up to 500mm (150+200+150mm) with a temperature control accuracy of ±1℃. Various large-size furnace tubes are available. The equipment has a rated temperature of 1100℃ and a continuous operating temperature ≤1000℃, ensuring temperature uniformity and long-term stability. The system also integrates high vacuum expansion capabilities (up to 10⁻⁶ torr with a molecular pump) and complies with CE safety standards, providing reliable protection for demanding scientific research experiments.

Main features:

Big tube size , long constant tem. zone, precise tem., suitable for multi-sample sintering or medium experiment.

Can put inner tube into the bid size outer tube, make big-area monolayer graphene growing test.

The device widely used in the field of semi-conductor, nanometer material, carbon fibre, graphene, etc. with cost-effective feature.

Main Application Areas:

With its large capacity, long isothermal zone, high precision, and vacuum compatibility, this equipment is widely used in the following research and production scenarios:

Two-dimensional material development: Particularly suitable for the growth experiments of large-area single-layer graphene and transition metal sulfides (such as MoS₂).

Semiconductor processing: Can be used for heat treatment processes such as annealing, oxidation, diffusion, and doping of semiconductor materials. Its high-precision temperature control and clean vacuum environment are crucial to ensuring device performance.

Nanomaterial synthesis: Suitable for the batch preparation of one-dimensional/zero-dimensional nanomaterials such as nanowires, nanotubes, and quantum dots. The long isothermal zone ensures uniform heating of samples at different locations, improving synthesis reproducibility.

New energy material processing: Used for the carbonization treatment of lithium-ion battery positive and negative electrode materials (such as graphite and silicon-carbon anodes), solid electrolyte sintering, etc. The large diameter can accommodate more crucibles, meeting the sample volume requirements for pilot-scale production.

High-performance ceramics and composite materials: Can be used for the preparation and heat treatment of ceramic matrix composites and carbon/carbon composites, as well as the calcination of high-purity ceramic powders.
 

Technical Parameters：

Max. Temperature	1100℃ ( 1 hr)/1400℃ /1600℃
Working Temperature	≤1000℃/≤1300℃ /≤1500℃
Tube Dimensions	Tube size: Φ60/80/100/120/150/210/280*1400mm (Customization available to meet customer needs) Overall size: 1300*650*1000mm Two fibrous ceramic tube blocks are included for blocking heat radiation generated from tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Vacuum Pressure	Mechanical pump Molecular pump
Vacuum Flange	Folding flanges
Temperature Accuracy	±1℃
Heating Elements	Resistance wire, Fe-Cr-Al Alloy doped by Mo
Length of constant zone	150+200+150mm Customization available to meet customer needs
Length of heating zone	300+300+300mm Customization available to meet customer needs
Temperature Controller	PID automatic control and auto-tune function. 30 programmable segments for precise thermal processing. Built-in protection for the over-heated and broken thermocouple.
Recommended heating Rate	≤10℃/min
Warning	Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating.
Warranty	One year limited warranty with lifetime support