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Customized vertical tube furnace CVD system

Model：KJ-TCVD1100-S40CK2

Customized vertical tube furnace CVD system

Description：

Introduction:
This tube CVD system mainly consists of: a 1200-degree dual-temperature zone tube furnace, a 3-channel mass flow meter gas supply system, a 2L/S p

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IntroductionFeaturesTechnical ParametersInquiryCustomer Case

Introduction:
This tube CVD system mainly consists of: a 1200-degree dual-temperature zone tube furnace, a 3-channel mass flow meter gas supply system, a 2L/S pumping speed vacuum pump and related connectors; a directional wheel and a universal wheel are installed below the equipment, and the overall equipment occupies The floor is small in size and can be flexibly moved.

features

Accurate temperature control. Temperature control is accurate ± 1 ℃.
Good heat preservation, fast heating, energy saving, long life and safety. customizable.
Adopt intelligent integrated design, safe, reliable and fast heating up.
Multi-temperature zone tube furnace can realize independent temperature control of multiple temperature zones.

Technical Parameters

Product name	KJ-TCVD1100-S40CK2 Model Vertical tube furnace CVD system
1200 degree fluidized tube furnace
Furnace chamber model	Dual temperature zone vertical opening structure, easy to take and place the furnace tube
Chamber material	Alumina refractory fiber
Heating element	High quality heating wire
Max. temperature	1200℃
Working temperature	≤1100℃
Heating rate	0-10℃/min
Heating zone	double zone（Independent temperature control for each temperature zone）
Furnace tube material	Customized high purity quartz
Furnace tube outer diameter	40mm
The length of the furnace tube is approx.	1100mm（Subject to actual needs）
Sealing method	A set of customized stainless steel vacuum flanges including sealing rings
Control mode	Touch screen multi-stage intelligent PID program temperature control, sintering data can be recorded and exported in excel format
Temperature curve	Multiple "time-temperature curves" can be set arbitrarily
Temperature measuring element	N type thermocouple temperature measurement
Air supply system: 3-way mass flow control system
Working temperature	5--45℃
Maximum air pressure	3*106Pa
gas channel	Can connect 3 kinds of air sources to micro positive pressure at the same time
flow meter	Mass flow meter (other ranges optional)
A channel range	1SLM
B channel range	1SLM
c channel range	1SLM
Air line pressure	-0.1～0.15 MPa
Accuracy	±1%F.S
Shut-off valve	Stainless steel material
Gas connection pipe	1/4 stainless steel pipe
Vacuum system
Vacuum pump	2L/S speed vacuum pump with silicone hose can quickly replace the gas in the furnace tube

Kejia have complete furnace types, can be vacuumed to pass the atmosphere, temperature control is accurate ± 1 ℃. Rotary tube furnace, multi-temperature zone tube furnace, vertical tube furnace, fluidized bed, etc. Can be customized.
Welcome to consult and customize.

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