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  • 1000℃ Max Slideable RTP (4'' OD) Tube Furnace with Rapidly Heating & Cooling


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-RTP is an RTP (4'' OD) furnace with Infrared Light Heating and Slide Cooling. It is capable of achieving a max. heating rate > 50°C/s  and a cooling rate  > 10°C/s. The furnace is designed for growing graphene and carbon nanotubes by CVD.
    Furnace Structure
    • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
    • One set of sliding rails is installed which allows the furnace to move from one side to the other side automatically at variable speeds using the control knob.
    • Vacuum flanges and the digital vacuum gauge are installed for immediate use.
    • Annealing wafer up to 4" diameter
    Power 9KW
    Voltage AC 208-240V Single Phase, 50/60 Hz
    Max. Temperature
    • 1000°C (<1 hour)     
    • 800°C (<2 hours)
    • 600°C (continuous) 
    • Note: RTP furnaces should not be heated for long durations due to thin refractories.
    Temperature Accuracy +/ - 2°C
    Max. Heating Rate 50  ºC/s
    Max. Cooling Rate
    • Cooling Rate from 900~200C:
    • 8.3°C/sec (900 - 600°C);
    • 4.4°C/sec (600°C - 500°C);
    • 2.8°C/sec (500°C - 400°C);
    • 1.6°C/sec (400°C - 300°C);
    • 0.9°C/sec (300°C - 200°C);
     Process Tube Size
    • High purity fused quartz tube
    • Ø4.05" OD x 1400mm L  
    Sliding Rails / Table
    • Dual sliding rails made of Cr plated steel
    • Sliding rail length: 1200 mm
    • Driven by DC motor
    Sliding Control
    Automatic sliding is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.
    • Sliding Range: 340mm
    • Sliding Speed: 0-70 mm/s; adjustable
    Heating Elements
    • 8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm)
    • Standard working life: 2000 hrs.  ( depends on heating rate )
    • The Halogen light tube is consumable.  Please click picture left to order a spare one
    Thermocouple K type, 1/4" Dia x 24" length        
    Temperature Controller
    • PID automatic controller with 30 programmable segments for control of heating rate, cooling rate, and dwell time.
    • Built-in overheating & thermocouple broken protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • RS485 Communications Port.
    • PC Control:
      • An MTS-02 control module is included for PC control on this furnace.
      • The new version of PC module is now compatible with Lab View 05/08/2014
      • A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. 
    Vacuum Flanges
    • Stainless steel vacuum flanges are installed on both ends of the tube.
    • Right flange:
      • Hinge-type flange for easy sample loading
      • 1/4"diameter  feedthrough for inserting  K-type thermal couple
      • Needle valve with barb gas fitting is built-in
    • Left flange:
      • The digital vacuum gauge is included
      • KF25 right angle valve is installed for connecting to a vacuum pump
      • Needle valve for vacuum release is included
    Vacuum Level 
    •  Limited by a vacuum pump
      • 10^-2 torr can be achieved by the mechanical pump
      • 10^-4 torr can be reached by molecular pump
         The vacuum pump is not included, please order separately 
    Flow Meter  One flow-meter is built-in with range: 16-160 ml/min
    460 x 330 x 520  mm ( furnace only)
    1800 x 450 x 680 mm ( furnace + sliding)
    Net Weight ~ 80 Kg
    Shipping Package Size 74" x 39" x 45"
    Shipping Weight 300 lbs
    Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products page).

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