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3 Zone 1100℃ Large-caliber Tube Furnace
  • 3 Zone 1100℃ Large-caliber Tube Furnace
  • 3 Zone 1100℃ Large-caliber Tube Furnace
  • 3 Zone 1100℃ Large-caliber Tube Furnace
  • 3 Zone 1100℃ Large-caliber Tube Furnace
  • 3 Zone 1100℃ Large-caliber Tube Furnace



    KJ-1100X-XX-III furnace is a CE certified three-zone tube furnace with 6", 8.5" or 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use.

    Specific Introduction:
        KJ-1100X-XX-III furnace is a CE certified three-zone tube furnace with 6", 8.5" or 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. Three 30 segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing and sintering processes.
    Model GSL-1100X-6-III GSL-1100X-8.5-III GSL-1100X-11-III  
    Fused quartz tube size
    • High purity quartz tube
    • Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
    152 O.D x 143 I.D x 1300mm L
    (6" O.D x 5.6" I.D x 51" L)
    216 O.D x 206 I.D x 1300mm L
    (8.5" O.D x 8.1" I.D x 51" L)
    279 O.D x 269 I.D x 1300mm L
    (11" O.D x 10.6" I.D x 51" L)
    NOTE: The customers must define one tube size before purchase. It is very difficult to change the tube size after because the chamber liners need to be replaced in order to fit the different tube size. 
    Quartz boats (optional) max. 4" wafer boat compatible Max. 6" wafer boat compatible Max. 8" wafer boat compatible
    Furnace structure
    • Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
    • Refractory fibrous alumina insulation liner for maximum energy saving.
    • Heating element: NiCrAl Resistance Wire
    • Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.   (Ceramic blocks must be fully inserted into the furnace chamber before heating) 
    • This furnace can be used as annealing or diffusion furnace for 8" wafer uses a quartz boat at the related product

    Heating zone
    • Total heating zone length 900 mm (36")
    • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
    • Constant temperature zone:
      • 750 mm (if three zones are in the same temperature within +/- 3°C)  longitude direction
      • 600 mm  (if three zones are in the same temperature within +/- 1°C) longitude direction
      • +/- 3 oC along the cross-section
    Working temperature
    • Max heating temperature: 1100°C ( < 1 hour )
    • Normal working temperature: 200~1000°C
    • Max heating & cooling rate: 10°C/min
    Temperature control   Three digital controllers with PID/self-tuning functions and 30 segments programmable.
    Thermocouple: three K type thermocouples (one for each zone)
    Control accuracy: +/- 1°C
    European Temperature Controllers (optional upgrade)
    • 1 heating channel
    • 1 program of 8 or 24 segment
    • Alarm Relay: Form 'A' and Form ‘C’ built-in 
    • Digital Communications: RS485
    • Temperature Accuracy:  ±  0.1ºC
    • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
    Vacuum sealing & Flange  
    A pair of SS vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included.
    Left Side Flange: Vacuum gauge, stainless steel needle valves and 1/4" barbed hose fitting.
    Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need an adapter KF40-KF25.
    • One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.
    • Vacuum Level: 10-2 torr by heavy-duty mechanical pump and 10-4 torr by regular turbo-pump.  5x10-7 torr can be reached by 700 L/s high-speed turbo pump and modified flange adaptor
    • The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost The complete calibration kit includes
      • One 48"L ( 1/4"OD)  K type calibration thermocouple
      • One Omega temperature calibrator
      • 5 feet long thermocouple power extension wire
    • You may consider ordering turbopump for hi-vacuum up to 10-5 torr
    Rated Voltage
    • Single Phase, 220V AC, 50/60 Hz
    • AWG 8# Power cord is included (without plug)
    Power consumption Max. 8KW (50A breaker required)
    Product Dimension 1879 L x 680W x 920 H mm (74" L x 24.5" W x 37" H)
    Net weight 200kg
    Shipping dimension 80" x 40" x 70"
    Shipping weight 800 lbs
    • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings, and quartz tube are not covered by the warranty)
    • You may contact us to order replacement quartz tube
    • CE Certified
    • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa    or  0.12 MPa (absolute pressure). 
    • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. 
    • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
    • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube


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