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1700℃ Three Zone Tube Furnace with Gas Mixer & Vacuum* System



KJ-1700X-60-III is a CE certified three zones tube furnace with 60mm Dia. alumina tube, mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5x10^-2 torr and mix 1- 3 type of gases

Specific Introduction:
    KJ-1700X-60-III  is a CE certified three zones tube furnace with 60mm Dia. alumina tube, mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5x10^-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
 Furnace Structure
Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of outside case < 55oC.
High purity fibrous alumina insulation for Max, energy saving.
Three independent heating zone via three precision temperature controllers.
Power Consumption  10 KW 
Input Voltage  AC 208-240V Single Phase, 50/60 Hz (75A air breaker required)
Heating Zone Three zones: total 25" (630 mm) heating zone (included two refractory separators)
  • Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
    • Working temperature  800 - 1400°C
    • Heating rate: 10°C/min
  •  Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
    • Working temperature 800 - 1700°C
    • Max. Heating rate: 5°C/min
  • Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
    • Working temperature  800 - 1400°C
    • Max. Heating rate:  10°C/min
Tube Size and Flange
  • 99.8% purity Alumina Tube
  • 2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
  • 60 mm stainless steel vacuum sealing flange with valve and meter is included
  • Two porous ceramic blocks are included for protecting flange from heating radiation
Temperature Controller
  • Three precision temperature controllers to control three zones separately.
  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum Gauge
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Pump
Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. The vacuum system can reach 5x10^-2 torr within 30 minutes of pumping. ( 220V is available for the outside USA)
One KFD25 adaptor is installed to flange for connecting to vacuum pump.
Stainless steel pipe ( 25mm Dia x 1000mm length ) is included for connecting to tube furnace with KFD25 adaptor and clamps.
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
Three Channel Gas Mixing and Delivery System

Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total) 
          1) Compact direct read flow meter, 10-100 cc/min.
          2) Compact direct read flow meter, 16-160 cc/min.
          3) Compact direct read flow meter, 25-250 cc/min.
One pressure meters is installed inside mobile cart which are able to monitor the pressure of mixing tank.
4 stainless steel needle valves are installed on the mobile cart
Two gas flowing pipes are provided for immediately use (one pipe from two mixed gases and another is independent gas) 
Optional:  in order to control gas delivery accurately, you may choose three channel gas delivery system controlled by precision digital mass flow meter at extra cost. 
Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Power Cable & Plug
10 feet length 8-3 AWG heavy duty UL approved power cable is included
Extra length cable can be ordered by clicking picture on left
Plug is not included, you can order from your local hardware store according to female plug in your lab
Dimensions Furnace:   863 L x 457 W x 711 H mm (34 L x 18 W x 28 H  inch)
Gas cart:  850 mm (L) x 600 mm  (W) x 700 mm ( H)
Net Weight 150Kg (furnace) + 100Kg  ( total  550lb)
Shipping Weight 800 lbs
Shipping Dimensions Two cases in one pallet: 45x45x35/case
Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products page).
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
  • Transformer is UL Certified
  • The tube furnaces with alumina tube are designed for using under vacuum and low pressure < 0.02 Mpa / 0.2 Bar/ 3 PSI 
  • Never use graphite crucible in alumina tube.
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely used up to 1500°C
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