Diffusion Oxidation Furnace (Research Type)

Description：

This equipment is a scientific research diffusion oxidation furnace, which is suitable for research and teaching in enterprise R&D, universities and research institutes....

Description:
This equipment is a scientific research diffusion oxidation furnace, which is suitable for research and teaching in enterprise R&D, universities and research institutes. It can meet closed-tube dry oxygen oxidation, wet oxygen oxidation, hydrogen oxygen synthesis oxidation, diffusion, annealing at atmospheric pressure, annealing/propulsion, alloying and other processes.

Main Features：
●It can meet closed-tube dry oxygen oxidation, wet oxygen oxidation, hydrogen oxygen synthesis oxidation, diffusion, annealing at atmospheric pressure, annealing/propulsion, alloying and other processes.
●Using high-reliability industrial control computer + PLC mode, automatic control the furnace temperature, advancing and retreating boat, gas flow and valves, realize the automation of all technological processes;
●With strong software functions, equipped with fault self-diagnosis software, which can greatly save maintenance time;
●With various of process pipelines, convenient for users to choose;
●It has powerful software functions and is equipped with fault self-diagnosis software, which can greatly save maintenance time;
●Automatic adjustment of the constant temperature zone, cascade control, can accurately control the actual process temperature of the reaction tube;
●With over temperature broken thermocouple, thermocouple short circuit, process gas flow deviation alarm and protection functions;
●Products can be customized according to user requirements.

Technical Parameters：
●Applicable wafer size: 2~8 inch wafer
●Working temperature: 600℃～1300℃;
●The number of tubes that can be equipped: 1~2 tubes/ set
●Length and accuracy of constant temperature zone: ≤±0.5℃/300~600mm (800℃～1300℃),
● Single-point temperature stability: ≤±0.5℃ /24h (1100℃);
●Temperature ramp capability: the maximum heating rate is 20℃/min, the maximum cooling rate is 5℃/min;