English
简体中文
Русский язык
Français
日本語
한국어
Português
Español
Website navigation
Position:
Leave A Message
E-mail:
Tell:
Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Fluidized Bed Chemical Vapor Deposition (FB-CVD) Reactor
Powder materials within the reactor are fluidized under the influence of a carrier gas, followed by coating and sintering processes. CVD processes using fluidized beds as reactors are characterized by uniform coating.
Advantages of FB-CVD:
1. High heat and mass transfer coefficients, exceeding those of traditional fixed-bed and moving-bed reactors by more than one order of magnitude.
2. Uniform temperature within the reaction zone, offering significant advantages for heat diffusion and replenishment in reactions with high thermal efficiency.
3. Uniform temperature control within the reaction zone, resulting in superior temperature precision and consistency compared to fixed-bed reactors.
4. High unit capacity due to efficient energy utilization and sufficient contact, significantly increasing the production capacity per unit bed compared to traditional fixed-bed reactors, a unique advantage.
5. Easy material loading and unloading due to the fluidized state of the reaction zone, resulting in significant improvements in energy consumption and production efficiency. Further advantages compared to fixed-bed reactors and moving-bed reactors.
6. The equipment adopts automated control, making it closer to commercially available equipment and significantly improving performance stability.
7. The equipment adopts an integrated design, meeting explosion-proof requirements.
Fluidized bed vapor deposition reactor (FB-CVD)
Powder materials within the reactor are fluidized under the influence of a carrier gas, followed by coating and sintering processes. CVD processes using fluidized beds as reactors are characterized by uniform coating.
Advantages of FB-CVD:
1. High heat and mass transfer coefficients, exceeding those of traditional fixed-bed and moving-bed reactors by more than one order of magnitude.
2. Uniform temperature within the reaction zone, offering significant advantages for heat diffusion and replenishment in reactions with high thermal efficiency.
3. Uniform temperature control within the reaction zone, resulting in superior temperature precision and consistency compared to fixed-bed reactors.
4. High unit capacity due to efficient energy utilization and sufficient contact, significantly increasing the production capacity per unit bed compared to traditional fixed-bed reactors, a unique advantage.
5. Easy material loading and unloading due to the fluidized state of the reaction zone, resulting in significant improvements in energy consumption and production efficiency. Further advantages compared to fixed-bed reactors and moving-bed reactors.
6. The equipment adopts automated control, making it closer to commercially available equipment and significantly improving performance stability.
7. The equipment adopts an integrated design, meeting explosion-proof requirements.
Fluidized bed vapor deposition reactor (FB-CVD)
Technical parameters
| Feeding amount | 1L~1000L，Higher volumes can be customized |
| gas source | H2, N2, Ar, O2, CO2, CH4, C2H2, SiH4, C3H6, Water vapor, etc. |
| Working temperature | ≤950℃，Higher temperatures can be customized |
| Material handling requirements | D50≥2μm |
Specifications
| Model | Type | Magnitude |
|---|---|---|
| FBCVD-10 | 1 KG | Experimental level |
| FBCVD-20 | 3 KG | Experimental level |
| FBCVD-100 | 20 KG | Pilot stage |
