KJ-1200-S6010LC3-3Z Gas-Mixing PECVD System consists of a tube furnace, a three-channel gas-mixing unit with mass flow meters, a vacuum pump unit and a RF plasma source.
|Product name||Gas-Mixing PECVD System|
|Tube Furnace||Insulation layer||Alumina ceramic fiber|
|Outside Shell Temperature||≤45℃|
|Heating Rate||20℃/min (Suggestion 10℃/min)|
|Heating Zone Length||300mm (Single Zone)|
|Heating Element||0Cr27Al7Mo2 resistance wire|
|Temperature Sensor||K-type thermocouple|
|Temperature Control Accuracy||±1℃|
Φ50, 60, 80, 100, 150mm available.
|Temperature Controller||PID automatic control with 30 programmable segments for precise control|
|Sealing||Flanges made of 304SS and silicon rubber rings
Gas valve on left flange
Vacuum angle valve with KF25 connector on the right flange
Note: Standard flange, KF flange and hinge flange are available.
|Power Supply||Single phase, 220V, 50Hz.|
|Vacuum pump unit||Vacuum pump
(With movable box)
|0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.|
|Pressure Gauge||Inficon Digital Pressure Gauge with high accuracy
Measurement Range 1×105--1×10-5Pa
|Plasma RF Power Supply||Output Power Range||5-300W Adjustable
|RF frequency||13.56 MHz ±0.005% stability|
|Reflection Power||200W max|
|RF Output Port||50 Ω, N-type, female|
|Power||208-240VAC, Single Phase, 50/60Hz|
|Gas-Mixing Unit with mass flow meters||Three precise mass flow meters (0.02% accuracy) are installed to control gas flow rate with touchscreen control for easy operation.
One gas mixing tank is installed on the bottom case.
MFC 1: Gas flow range from 0~100 SCCM
MFC 2: Control range from 0~200 SCCM
MFC 3: Control range from 0~500 SCCM
Gas inlet fitting: four 1/4NPS.
Gas outlet fitting: four 1/4NPS.
Power: 185-220VAC 50/60Hz
4 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.
|Chiller (Optional)||Be used to cool the tube and vacuum pump.|
|Notes||Pressure higher than 1.02Mpa will break the tube.
Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.
No vacuum condition is allowed when the temperature is higher than 1000℃.
Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.
If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
|Warranty||One year with lifetime technical support.|
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