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  • Compact Auto-Sliding PECVD Tube Furnace with 2" OD Quartz Tube and Vacuum Pump, Max. 1200℃C


    Continuous Temp:

    Chamber/Tube size:


    Specific Introduction:
        KJ-1200X-50S is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to an advanced model with options. It is an ideal tool for the researcher to make innovation under a limited budget.

    • Lower temperature processing compared to conventional CVD. 
    • High heating & cooling rate using sliding furnace
    • Film stress can be controlled by high/low frequency mixing techniques. 
    • Control over stoichiometry via process conditions.
    • Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
    Auto-Sliding Split Tube furnace

    • Input power: 208 – 240V AC, 1.2kW
    • 1200°C Max. working temperature for < 60 minutes
    • 1100°C Max for continuous heating
    • High purity quartz tube 2"OD x 1.7"ID x  39.4" Length 
    • 30 segments programmable precision digital temperature controller
    • 8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C . 
    Plasma RF Generator
    • Output Power:          5 -300W adjustable with ± 1% stability
    • RF frequency:          13.56 MHz ±0.005% stability
    • Reflection Power:      200W max.
    • Matching:                 Automatic
    • RF Output Port:        50 Ω, N-type, female
    • Noise:                      <50 dB. 
    • Power:                     208-240VAC, 50/60Hz
    • Cooling:                 Air cooling. (water cooling is available upon request, and a water chiller can be ordered separately     Note: Water cooling is necessary for long time operation

    Vacuum Flanges and Fittings
    • Vacuum flange set is made of stainless steel 304.
    • Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamps, a KF-25 right-angle valve, a KF-25 vacuum bellows, flange support, 3/8 O.D barbed fitting, and a needle valve.
    • Right flange assembly includes a digital Pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough, a needle valve, and a KF-16 quick clamp set
    Vacuum Pump 
    • 208 - 240V / 50-60 Hz (750W Max.)
    • 220 liters / M or 7.8 CFM
    • Oil Mist Eliminator is included
    • Max. vacuum:  3 X 10E-3 torr

    Product Dimensions
    • Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)
    • Net weight: 350 lbs
    • Shipping weight: 480 lbs
    Oxygen Monitoring (Optional) An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.

    Low-cost Compact Anti-Corrosion Three Channel Gas Mixer
    Compact Liquid Vaporization Systems
    Three Channels MFC-Gas Control System 
    Constant temperature controls module
    The KJ-1200X-S50-PESL package adds gas mixing & delivery capabilities onto the furnace system by integrating four Channel Gas Mixing Station with PLC Touch Panel Control and Precision Mass Flow Meters.      

    One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products page.)

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