Tel Number
180-3717-8440
Model:KJ-T1200-S200-4ZH-PE
Description:
The large diameter PECVD system ionizes the gas containing the film constituent atoms by radio frequency to form a plasma locally. The plasma has a strong chemical activity and is easy to react to deposit the desired film on the substrate. This system is
product name | Large diameter PECVD system (CE certification) |
Slide rail tube furnace part | |
Product number | KJ-T1200-S200-4ZH-PE |
Furnace tube size | Φ200mmX1200mm |
Furnace tube material | Quartz tube |
Heating zone | 400mm |
Operating temperature | 1100°C |
Maximum temperature | 1200°C |
Temperature control method | K-type thermocouple |
way to control | Touch screen control, you can adjust the angle of the temperature control screen according to actual use needs, making it more convenient to use |
Temperature control accuracy | ±1℃ |
Temperature control protection | With over-temperature and burnout protection function |
Heating rate | 0-20ºC/min, recommended 10ºC/min |
Heating element | Molybdenum resistance wire |
Operating Voltage | AC 220V single-phase 50HZ (circuit voltage users can choose to customize) |
Furnace material | Alumina polycrystalline fiber |
Flange joint | Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed |
Sealing system | The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness. |
case | Stainless steel housing |
Optional | Auxiliary cooling fan |
Vacuum system part | |
name | Vacuum system |
The main parameters | 1. Using high vacuum molecular pump set, the ultimate vacuum can reach 10-3pa 2. KF25 quick connection, stainless steel bellows, manual baffle valve and flange, vacuum pump connection; 3. Digital vacuum display, its measurement range is 5 ×10-5-1500mbar, high measurement accuracy |
Pneumatic system part | |
name | Four-way mass flow meter |
The main parameters | Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range: 1. MFC 1-MFC4: 0-1000sccm adjustable 2. A gas mixing tank 3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases; 4. Air inlet and outlet: 3 In and out flow control: manual rotary adjustment connection mode: double ferrule connection |
Plasma power supply part | |
name | 500W plasma power supply |
Power range | 0-500W (continuously adjustable) |
working frequency | 13.56MHZ+0.005% |
Operating mode | Continuous output |
RF output impedance interface | N-type, female (50Ω) |
Power stability | ≤2W |
Maximum reflected power | 70W |
Power protection settings | DC over-current protection, power amplifier over-temperature protection, reflected power protection |
Supply voltage/frequency | Single-phase AC (187V-253V) 50-60HZ |
cooling method | Air-cooled |
Certification | ISO certification, CE certification |
After-sales service | One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty) |
Tel Number
180-3717-8440
web@kejiafurnace.com
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