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three-temperature zone tube furnace CVD system
  • three-temperature zone tube furnace CVD system
  • three-temperature zone tube furnace CVD system
  • three-temperature zone tube furnace CVD system
  • three-temperature zone tube furnace CVD system
  • three-temperature zone tube furnace CVD system

    Model:KJ-TCVD1600-L80LB3W

    Description:

    This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature o


    Brief Introduction
     
    This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature of this furnace can reach 1600℃, and the vacuum degree can reach 10pa.

    Main Features
     
    1. The heating element is made of high-quality MoSi2, and the furnace is made of ceramic fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and energy-saving effect is obviously better than that of domestic fiber materials.
    2. Over temperature alarm and power off, leakage protection, safe and reliable operation.
    3. Independent temperature controller. 30-level programmable temperature.

    Heating System(Tube Furnace)
     
    Max. temperature 1700 
    Working temperature 1600
    Display LED display
    Tube size 80mm(OD)
    Tube Material High Quality alumina tube
    Hot zone length 220+220+220mm(There will be a gap between each zones)
    Heating Element MoSi2
    Heating rate 0-5℃/min
    Temperature control
     
    ● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
    ● 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
    ● Over temperature protection and alarm allows for operation without attendant.
    Thermocouple
    1. 3pcs thermocouple(Both measurement & temperature control function) located in the middle of the each hot zones(out side the tube)
    2. 1pcs thermocouple(Only measure the temperature) located inside the tube.
    Temperature accuracy ±1℃
    Furnace structure
    1. Double layer steel casing with dual cooling fan, temperature of furnace shell below 60 oC.
    2. Non-Splitable door design.
    Vacuum Flange Stainless Steel vacuum flange with valve.
    Working voltage 220V 50Hz
    Max. Power 6KW
    Certification CE

    Gas System
     
    4 Channel Mass Flow Meter
     
    Four precision mass flow meters :
    MFC 1: Gas flow range from 0~100 sccm
    MFC 2: Control range from 0~200 sccm
    MFC3: Control range from 0-500sccm
    MFC4: Control range from 0~200 sccm
     (or according to your requirement)
    One gas mixing tank is installed on bottom case with liquid release valve
    4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing.

    Vacuum Pump +Vacuum Gauge System
     
    Vacuum Pump+Vacuum Gauge Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State)

    Warranty
     
    Certificate CE
    Warranty One-year limited warranty with life time support.  (Consumable parts such as heater and crucibles are not covered by the warranty, please order the replacement at related products)
    Free technical support Lifetime

    Inquiry

    Please leave a message here. We will reply you in 24 hours.

    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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    Zhengzhou/Kejia

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