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Slideway CVD system
  • Slideway CVD system
  • Slideway CVD system
  • Slideway CVD system
  • Slideway CVD system
  • Slideway CVD system

    Model:KJ-T1200-S60LK2

    Description:

    The slideway CVD tube furnace system is composed of a 1400°C tube furnace, a 1200°C tube furnace and a gas system. The hearth is made of high-quality high-purity alumina polycrystalline fiber. The material has good thermal insulation performance, high ref

    1400℃ tube furnace part
    Furnace structure Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 50 ℃
    Furnace material High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
    maximum temperature 1400℃
    continuous working temperature ≤1300℃
    Heating rate Recommended ≤10°C/min, the fastest heating rate is 20°C/min
    Furnace tube material Depending on the temperature of use, replace the tubes of different materials
    Furnace tube size Outer diameter: 60mm
    Heating zone length 500mm
    Temperature Control System The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions
    1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs
    2. Temperature control accuracy ±1ºC
    3. With over-temperature protection and burnout protection
    4. The instrument has the function of temperature self-tuning
    Heating element High temperature silicon carbide rod
    Temperature measuring element S type thermocouple
    Working power AC220V,50Hz
    rated power 5KW(subject to actual power)
    sliding device Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling
    Shared slideway with 1200℃ tube furnace
    1200℃ tube furnace part
    Furnace structure Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 50 ℃
    Furnace material High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
    continuous working temperature ≤1100℃
    Heating rate Recommended ≤10°C/min, the fastest heating rate is 20°C/min
    Furnace tube size Φ60mm (The length is subject to the actual temperature)
    Heating zone length 300mm
    Temperature Control System The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions
    1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs
    2. Temperature control accuracy ±1ºC
    3. With over-temperature protection and burnout protection
    4. The instrument has the function of temperature self-tuning
    Heating element Molybdenum alloy resistance wire
    Temperature measuring element K type thermocouple
    Working power AC220V,50/60Hz
    rated power 3KW (subject to actual power)
    sliding device Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling
    Shared slideway with 1400℃ tube furnace
    Flange seal The 1400°C tube furnace and the 1200°C tube furnace share a quartz tube and slideway, the two ends of the quartz tube are sealed with stainless steel flanges, the left flange has an air inlet, and the right flange is an air outlet
    Air system part
    Mass flowmeter Three-way precision mass flowmeter: digital display, automatic control of gas flow.
    MFC1 Range: 0-500 sccm (range optional)
    MFC2 range: 0-500 sccm (range optional)
    MFC3 range: 0-500 sccm (range optional)
    Air way: 3 way
    Flow accuracy: 0.2%
    Inlet and outlet ports: 1/4" ferrules
    Each gas path has an independent stainless steel needle valve control.
    The gas flow is adjusted by the knob on the control panel.
    Standard configuration 1 host, 1 set of gas system, 1 set of flange, 1 piece of quartz tube, 2 pieces of furnace plug, 1 piece of crucible hook, 1 pair of high-temperature gloves, 1 copy of instruction manual, 1 copy of certificate and warranty card
     
    slideway tube cvd system

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