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CVD coating system for semiconductor industry
  • CVD coating system for semiconductor industry
  • CVD coating system for semiconductor industry
  • CVD coating system for semiconductor industry
  • CVD coating system for semiconductor industry
  • CVD coating system for semiconductor industry

    Model:KJ-TCVD1100-S60CK1

    Description:

    The CVD system uses a gaseous compound or a mixture of compounds to undergo a chemical reaction on the heating surface of the substrate. It is a film material preparation system that generates a non-volatile coating on the surface of the substrate , which

    1. Introduction
    The CVD system uses a gaseous compound or a mixture of compounds to undergo a chemical reaction on the heating surface of the substrate. It is a film material preparation system that generates a non-volatile coating on the surface of the substrate , which consists of a vacuum tube furnace, a multi-channel gas mixing system and a vacuum system. It is suitable for CVD process, such as silicon carbide coating, ceramic substrate Sheet conductivity test, controllable growth of ZnO nanostructure, ceramic capacitor (MLC C ) atmosphere sintering and other experiments.
    The CVD vacuum system can be equipped with molecular pump system or rotary vane pump system, the highest vacuum degree can reach 10*-3pa, The multi-channel gas source mixing system can be equipped with a float flowmeter or a mass flowmeter, which has a large range and high control accuracy; There are also a variety of functions that can be customized according to customer requirements.
     
    2. Main functions and features
     1) 
    Professional heating elements are used, and the furnace insulation material is made of polycrystalline fiber material, which has good thermal insulation performance and is durable. It has high tensile strength, no miscellaneous balls, high purity, and the energy-saving effect is obviously better than that of domestic fiber materials. 
     2) The entire furnace body adopts a double-layer liner structure with air gap isolation in the middle. Even if the furnace temperature reaches the highest point, the surface of the furnace body can still be safely touched without feeling hot.
    3) The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of that of the same traditional electric furnace, which is energy-saving and environmentally friendly.
    4) The furnace body is equipped with : output voltage and output current monitoring meter, the heating status of the furnace is clear at a glance.
    5) Over-temperature alarm and power off, leakage protection, safe and reliable operation with multiple protection functions.
    6) The CVD system consists of: heating furnace system, gas mixing station system, vacuum system and pressure control system.

    3. Technical Parameters
    Product name CVD Chemical Vapor Deposition System
    Product model KJ-TCVD1100-S60CK1
    Heating Furnace system
    sliding tube furnace
    Slide rail With sliding rail to achieve rapid heating or cooling
    Heating zone 400mm
    Tube size 60 mm x1400mm outer diameter x length
    Tube material High purity quartz tube
    Working temperature ≤ 1100°C
    Temperature control Intelligent 30-segment PID microcomputer programmable automatic control
    Temperature control accuracy ±1℃ ( with over-temperature and Thermocouple-broken alarm function)
    heating rate Suggest 0~10℃/ min
    heating element Resistance wire
    Rated voltage Single phase 220V 50Hz
    Permeable gas gases such as nitrogen and argon
    Temperature measuring element Thermocouple temperature measurement
    Shell structure Double shell structure with air cooling system
    Vacuum flange Flange end with 1/4" tube fitting inlet, 60 mm flange.
    Gas mixing station system
     
     
     
     
    Mass Flowmeter
    Four-way precision MFC flowmeter:
    Measurement accuracy: ±1.5% FS
    Flow range: : 0~200 sccm (based on customer’s requirement )
    Flow range: : 0~200 sccm (based on customer’s requirement )
    Flow range: : 0~2 00 sccm (based on customer’s requirement)
    Flow range: : 0~500 sccm (based on customer’s requirement )
    Adjust gas flow via touch screen
    Vacuum System
    vacuum system Rotary vane pump, the vacuum degree can reach 1pa in the cold state of the empty furnace,
    Vacuum gauge: Imported digital display vacuum gauge displays vacuum degree in real time with high precision.
    Pressure Control System
    Control Range  
    Overall controllable pressure range -20kpa to 20kpa (relative pressure)
    Or based on your requirement.
    Others
    Automation control 1 5 ” touch screen Touch screen interface integrated control furnace, vacuum pump, mass flow meter and pressure control system . The furnace part needs to set up the temperature time curve first. The integrated control section can control Start and stop of temperature curve, vacuum degree, gas flow, pressure relief valve, etc.
     
    Standard accessories
    1 digital vacuum gauge, 1 pair of quartz furnace plugs, 1 pair of high-sealing flanges, fluorine rubber sealing ring 2 pairs, 1 high-temperature crucible hook, 1 hex wrench for disassembling the flange, warranty card instruction manual 1 copy
     


     

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