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Low Vacuum CVD System
  • Low Vacuum CVD System
  • Low Vacuum CVD System
  • Low Vacuum CVD System
  • Low Vacuum CVD System
  • Low Vacuum CVD System

    Model:KJ-T1200-S60-CVD

    Description:

    Product Name Low Vacuum CVD System Model KJ-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure, equipp

    Product Name Low Vacuum CVD System
    Model KJ-T1200-S60-CVD
    Tube furnace part
    Furnace structure Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃
    Furnace Material High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
    Max.Temperature 1200℃
    Continuous working temperature 1100℃
    Heating rate Recommended ≤10°C/min, the fastest heating rate is 20°C/min
    Furnace tube material High purity quartz tube
    Furnace tube size OD:60mm* ID:54mm * length 1200mm
    The instrument must be plugged in before use to prevent heat radiation
    Heating zone length 220+220+220mm
    flange Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange
    Temperature Control System The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions
    1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs
    2. Temperature control accuracy ±1ºC
    3. With over-temperature protection and burnout protection
    4. The instrument has the function of temperature self-tuning
    Heating element Molybdenum alloy resistance wire
    Temperature measuring element K type thermocouple
    Working power AC220V,50/60Hz
    Rated power 5KW
    Air inlet and outlet The flange contains vacuum connection port, air inlet and outlet
    Air system part
    Mass flowmeter Four-way precision mass flowmeter: digital display, automatic control of gas flow.
    MFC1 range: 0-500 sccm (range optional)
    MFC2 range: 0-500 sccm (range optional)
    MFC3 range: 0-500 sccm (range optional)
    MFC4 range: 0-500 sccm (range optional)
    Gas circuit: 4 channels
    Vacuum system part
    vacuum pump DRV10 rotary vane pump pumping

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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