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Kejia High Vacuum CVD System
  • Kejia High Vacuum CVD System
  • Kejia High Vacuum CVD System
  • Kejia High Vacuum CVD System
  • Kejia High Vacuum CVD System
  • Kejia High Vacuum CVD System

    Model:KJ-T1400-4CVD

    Description:

    KJ-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system. 

    Brief Introduction:  
    KJ-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system. 
     
    Technical Parameter:
    Model KJ-T1400-4CVD
                  Part I: Single Zone Sliding Type Tube Furnace
      Tube Furnace
    (The furmace will be sliding type)
     
    Display LED
    Furnace Structure Split type and upper part can be opened.
    Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving.
    Max. Temperature 1400℃ for short time
    Continuous Working Temp. ≤1300℃
    Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
    Temperature Zone 300mm  single zone
    Heating Element SiC rods
    Thermocouple K type
    Temperature Control Accuracy ±1℃
    Processing Tube 60 x 1200mm (OD x L)
    Material: High pure Quartz
      Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). 
    Temperature Controller -PID automatic control via SCR (Silicon Controlled Rectifier) power control
    -30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    -Built-in over temperature alarm and protection allows for operation without an attendant.
    - +/- 1 ºC temperature control accuracy.
    Power 220V, 50 Hz, single phase at max. 4KW
    Part II:Water Cooling System
    Water cooled flange + water chiller
    (Below photo is only for reference,
    please only
    reference water
    cooling part)

     
    Water cooled Vacuum Flange  Water Cooled Sealing flange with valve
    and Mechanical vacuum gauge.
    Made of Stainless Steel with double high temperature silicon O-rings on the flange.   
    Stainless steel needle valve with 1/4" pipe adapter.
    Mechanical vacuum gauge is installed in one side of flange.
    Water Cool System is an ideal tool for supplying cooling water to this flange set
     
    Water Chiller furnace
    Max. Flow rate 10L/min
    Part III:  4 Channels Mass Flow Meter and Controllers
    Mass Flow Meter
    (touch screen for option need extra cost)

     
    Four precision mass flow meters :
    MFC 1: Gas flow range from 0~500 sccm   Ar
    MFC 2: Gas flow range from 0~5 sccm     02
    MFC 3: Gas flow range from 0~20 sccm    CH4
    MFC 4: Gas flow range from 0~100 sccm   H2
    One gas mixing tank is installed on bottom case with liquid release valve
    4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
     
    Part IV: Turbomolecular Pump System
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    Forepump model WXG-4B
    Displacement Speed 4L/S
    Ultimate pressure(Pa) ≤1.5
    Scroll pump leakage rate 1×10-6 Pa.m3/S,special gas can be 1×10-8Pa.m3/S
    Water vapor handling capacity 25g/day
    Rotational Speed of pump(50HZ) 1450rpm
    Inlet flange KF25
    Outlet flange KF25
    Turbomolecular model FJ-110
    Turbo pump speed 110L/S
    Inlet flange DN100CF
    Compression Ratio N2:>108, H2:5x102
    Ultimate vacuum (Pa) 6x10-7Pa
    Suggest run vacuum(Pa) <100
    Cooling method Air /water
    Weight(kg) 52
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    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

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