KJ-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system.
|Part I: Single Zone Sliding Type Tube Furnace|
| Tube Furnace
(The furmace will be sliding type)
|Furnace Structure||Split type and upper part can be opened.
Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving.
|Max. Temperature||1400℃ for short time|
|Continuous Working Temp.||≤1300℃|
|Heating Rate||Suggestion: 0~10℃/min (max. 20℃/min)|
|Temperature Zone||300mm single zone|
|Heating Element||SiC rods|
|Temperature Control Accuracy||±1℃|
|Processing Tube||60 x 1200mm (OD x L)|
|Material: High pure Quartz|
|Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).|
|Temperature Controller||-PID automatic control via SCR (Silicon Controlled Rectifier) power control
-30 programmable segments for precise control of heating rate, cooling rate and dwell time.
-Built-in over temperature alarm and protection allows for operation without an attendant.
- +/- 1 ºC temperature control accuracy.
|Power||220V, 50 Hz, single phase at max. 4KW|
|Part II:Water Cooling System|
|Water cooled flange + water chiller
(Below photo is only for reference,
|Water cooled Vacuum Flange||Water Cooled Sealing flange with valve
and Mechanical vacuum gauge.
Made of Stainless Steel with double high temperature silicon O-rings on the flange.
Stainless steel needle valve with 1/4" pipe adapter.
Mechanical vacuum gauge is installed in one side of flange.
Water Cool System is an ideal tool for supplying cooling water to this flange set
Max. Flow rate 10L/min
|Part III: 4 Channels Mass Flow Meter and Controllers|
|Mass Flow Meter
(touch screen for option need extra cost)
|Four precision mass flow meters :
MFC 1: Gas flow range from 0~500 sccm Ar
MFC 2: Gas flow range from 0~5 sccm 02
MFC 3: Gas flow range from 0~20 sccm CH4
MFC 4: Gas flow range from 0~100 sccm H2
One gas mixing tank is installed on bottom case with liquid release valve
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
|Scroll pump leakage rate||1×10-6 Pa.m3/S，special gas can be 1×10-8Pa.m3/S|
|Water vapor handling capacity||25g/day|
|Rotational Speed of pump(50HZ)||1450rpm|
|Turbo pump speed||110L/S|
|Compression Ratio||N2:＞108, H2:5x102|
|Ultimate vacuum (Pa)||6x10-7Pa|
|Suggest run vacuum(Pa)||＜100|
|Cooling method||Air /water|