KJ-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases forCVD.
|Part I: Standard Parts|
|Chamber||Split type and upper part can be opened|
|Max. Temperature||1600℃ for short time|
|Continuous Woking Temp.||≤1500℃|
|Heating Rate||Suggestion: 0~10℃/min (max. 20℃/min)|
|Heating Element||MoSi2 heating element|
|Temperature Control Accuracy||±1℃|
|Tube Size||80 x 1000mm (OD x minimum L)|
|Material: High purity alumina Tube|
|Temperature Control||PID automatic control via SCR power control|
|Heating curves||30 steps programmable|
|Vacuum Flange||Stainless Steel vacuum flange with valve|
|Power||220V, 50 Hz, single phase at max. 4KW|
|Vacuum Pump System
||Rotary Vane Vacuum Pump+ diffusion vacuum pump||Vacuum pump group: Ultimate vacuum 10-6 Torr.
The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel.
|Mass Flow Meters||Four precision mass flow meters :
One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually
|Warranty||1 year ( not including consumable parts such as heating element, thermocouple, and tube)|
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