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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Brief Introduction:
KJ-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases forCVD.
Technical Parameter:
KJ-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases forCVD.
Technical Parameter:
| Model | KJ-T1600 CVD | |
| Part I: Standard Parts | ||
| Tube Furnace |
Display | LED |
| Chamber | Split type and upper part can be opened | |
| Max. Temperature | 1600℃ for short time | |
| Continuous Woking Temp. | ≤1500℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 300mm | |
| Heating Element | MoSi2 heating element | |
| Thermocouple | B type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 80 x 1000mm (OD x minimum L) | |
| Material: High purity alumina Tube | ||
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange | Stainless Steel vacuum flange with valve | |
| Power | 220V, 50 Hz, single phase at max. 4KW | |
| Vacuum Pump System |
Rotary Vane Vacuum Pump+ diffusion vacuum pump | Vacuum pump group: Ultimate vacuum 10-6 Torr. The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel. |
| Mass Flow Meters | Four precision mass flow meters : One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually |
|
| Warranty | 1 year ( not including consumable parts such as heating element, thermocouple, and tube) | |
