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  • High Temperature High Vacuum 4MFCs CVD system

    Model:KJ-T1600 CVD

    Continuous Temp:

    Chamber/Tube size:


    Brief Introduction:  
    KJ-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases forCVD. 
    Technical Parameter:
    Model KJ-T1600 CVD
    Part I: Standard Parts
    Tube Furnace
    Display LED
    Chamber Split type and upper part can be opened
    Max. Temperature 1600℃ for short time
    Continuous Woking Temp. ≤1500℃
    Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
    Temperature Zone 300mm
    Heating Element MoSi2 heating element
    Thermocouple B type
    Temperature Control Accuracy ±1℃
    Tube Size 80 x 1000mm (OD x minimum L)
    Material: High purity alumina Tube
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Vacuum Flange Stainless Steel vacuum flange with valve
    Power 220V, 50 Hz, single phase at max. 4KW
    Vacuum Pump System
    Rotary Vane Vacuum Pump+ diffusion vacuum pump Vacuum pump group: Ultimate vacuum 10-6 Torr.
    The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel.
    Mass Flow Meters Four  precision mass flow meters :
    One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually

    Warranty 1 year ( not including consumable parts such as heating element, thermocouple, and tube)

    High Temperature High Vacuum 4MFCs CVD system

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