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CVD Crucible furnace evaporation system
  • CVD Crucible furnace evaporation system
  • CVD Crucible furnace evaporation system
  • CVD Crucible furnace evaporation system
  • CVD Crucible furnace evaporation system
  • CVD Crucible furnace evaporation system

    Model:KJ-T1600-CVD

    Description:

    The KJ-T1600-CVD crucible furnace evaporation system forms a dense HfCl4、TiCl4 etc coating on the surface of the target material. It consists of an evaporator, a mixer and a reactor.


    Model:KJ-T1600-CVD

    1.Tube Furnace Part:
    Technical Parameter:
    Tube Furnace
    Max. Temperature 1600℃
    Tube Size Φ100mm
    Heat zone length 300mm
    Heating element MoSi2 rods
    Thermo couple B Type
    Display LED
    Tube material Alumina
    Chamber material Ceramic fiber
    Furnace shell material Carbon steel
    Temperature Control PID automatic control via SCR power control
    Heating Rate 0~20℃/max.(Suggest 0-10℃/min)
    Temperature control accuracy ±1℃
    Temperature uniformity ±5℃
    Max. Power 4.0KW
    Heating curves 30 steps programmable
    Working Voltage 220V, 50HZ (or 380V)
    Vacuum Flange Water cooling flange with valve
    flowmeter part
    Five flowmeters FFC 1+MFC 1: H2   Gas flow range from 0~500 sccm
    FFC 2+MFC 2: CH4  Gas flow range from 0~100 sccm
    FFC 3+MFC 3: Ar1:  Gas flow range from 0~700 sccm
    FFC 4+MFC 4: Ar2:  Gas flow range from 0~700 sccm
    FFC 5+MFC 5: Gasification gas:Gas flow range from 0~700 sccm
    ( Gas flow range according to your requirement)

    2.Gas mixer part:
    Technical Parameter :
    Display LED
    Max. Temperature 1200℃ for short time
    Continuous Working Temp. ≤1100℃
    Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
    Tube material 310S
    Temperature heating zone About 200mm(According to design)
    Diameter About OD165mm(According to design)
    Temperature Control Accuracy ±1℃
    Heating Element Resistance wire
    Thermocouple K Type
    Max. Power 2.0 KW
    Working Voltage 220V, 50HZ (or according to your requirement)
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Chamber material Alumina Fiber

     3.Gasification gas part
    Technical Parameter :
    Max Temperature 1200℃
    Crucible diameter 250mm
    Crucible depth 400mm
    Heating element Resistance wire
    Thermo couple K Type
    Chamber material Ceramic fiber
    Furnace shell material Carbon steel
    Crucible material Stainless steel 310S
    Temperature Control PID automatic control
    Heating Rate Max. 0~20℃/min
    Temperature control accuracy ±1℃
    Max. Power 4.5KW
    Working Voltage 220V, 50HZ (or 380V)
    According to your requirement

    Inquiry

    Please leave a message here. We will reply you in 24 hours.

    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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