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  • CVD Crucible furnace evaporation system

    Model:KJ-T1600-CVD

    Continuous Temp:

    Chamber/Tube size:

    Description:


    Model:KJ-T1600-CVD

    1.Tube Furnace Part:
    Technical Parameter:
    Tube Furnace
    Max. Temperature 1600℃
    Tube Size Φ100mm
    Heat zone length 300mm
    Heating element MoSi2 rods
    Thermo couple B Type
    Display LED
    Tube material Alumina
    Chamber material Ceramic fiber
    Furnace shell material Carbon steel
    Temperature Control PID automatic control via SCR power control
    Heating Rate 0~20℃/max.(Suggest 0-10℃/min)
    Temperature control accuracy ±1℃
    Temperature uniformity ±5℃
    Max. Power 4.0KW
    Heating curves 30 steps programmable
    Working Voltage 220V, 50HZ (or according to your requirement)
    Vacuum Flange Water cooling flange with valve
    Float  flowmeter
    Four float  flowmeters FFC 1: H2   Gas flow range from 0~500 sccm
    FFC 2: CH4  Gas flow range from 0~100 sccm
    FFC 3: Ar1:  Gas flow range from 0~700 sccm
    FFC 4: Ar2:  Gas flow range from 0~700 sccm
    ( Gas flow range according to your requirement)
    Mass flowmeter
     
     
     
    Mass flowmeter
    Four precision Mass flowmeter :
    MFC 1: H2   Gas flow range from 0~500 sccm
    MFC 2: CH4  Gas flow range from 0~100 sccm
    MFC 3: Ar1:  Gas flow range from 0~700 sccm
    MFC 4: Ar2:  Gas flow range from 0~700 sccm
    ( Gas flow range according to your requirement)

     

    2.Gas mixer part:
    Technical Parameter :

    Display LED
    Max. Temperature 1200℃ for short time
    Continuous Working Temp. ≤1100℃
    Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
    Tube material 310S
    Temperature heating zone About 200mm(According to design)
    Diameter About OD165mm(According to design)
    Temperature Control Accuracy ±1℃
    Heating Element Resistance wire
    Thermocouple K Type
    Max. Power 2.0 KW
    Working Voltage 220V, 50HZ (or according to your requirement)
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Chamber material Alumina Fiber

     3.Crucible furnace part
    Technical Parameter :
    Max Temperature 1200℃
    Crucible diameter 250mm
    Crucible depth 400mm
    Heating element Resistance wire
    Thermo couple K Type
    Chamber material Ceramic fiber
    Furnace shell material Carbon steel
    Crucible material Stainless steel 310S
    Temperature Control PID automatic control
    Heating Rate Max. 0~20℃/min
    Temperature control accuracy ±1℃
    Temperature uniformity ±5℃
    Max. Power 4.5KW
    Working Voltage 220V, 50HZ (or according to your requirement)
     

    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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