Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>

Position:Home > Products > CVD/PECVD System > CVD Furnace System
Custom CVD Furnace System
  • Custom CVD Furnace System
  • Custom CVD Furnace System
  • Custom CVD Furnace System
  • Custom CVD Furnace System
  • Custom CVD Furnace System



    Part I: Standard Parts heating
    Tube Furnace Display LED Display(Computer Control)
    Max. Temperature 1200
    Temp. Working ≤1100℃
    Temperature Zone 150*200*150mm(3 Zones)
    independent temperature control

    Part I: Standard Parts heating
    Tube Furnace
    Display LED Display(Computer Control)
    Max. Temperature 1200
    Continuous Temp Working  ≤1100℃
    Temperature Zone 150*200*150mm(3 Zones)
    independent temperature control
    Heating Element Electric wire with Mo
    Thermocouple K type
    Temperature  Accuracy Control  ±1℃
    Tube Size
    160x 1000mm (OD x minimum L)
    150mm(ID±2mm) Thickness 5mm
    Material:Quartz tube
    quarz tube
    Temperature Control PID  automatic  control  via  SCR power
    Heating curves 30 steps programmable
    Safety Element
    Over-temperature Alarm Over-current protection Power off when door open
    Thermocouple broken indication
    Vacuum Flange
    One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a
    Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release high
    3 way Valve One for KF25 vacuum valve
    Second for 1/8” valve
    Third for 1/2” valve(to bubbler)
    Power Supply 380V 50/60Hz 3 phases
    Output Power Base on the final design
    Part 2 Vacuum pump system
    Vacuum Pump

    VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valve
    Vacuum rate: -0.1mpa(Relative
    Part 3 4 way Mass flow meters
    4 Way Mass Flow Meters (Computer control)
    Four precision mass flow meters :
    MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. Ar
    4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually
    MFC could be controlled on the computer.
    l Mixing gas will be pre-heating at 100-200C before flow into the furnace tube.
    l SS tube with sprial shape
    l (For reference only)
    cvd tube furnace


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