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  • Custom CVD Furnace System

    Model:KJ-T1200CVD

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Part I: Standard Parts heating
     
     
     
     
     
     
     
     
     
     
     
     
     
     
     
     
    Tube Furnace
    Display LED Display(Computer Control)
    Max. Temperature 1200
    Continuous
    Temp.
    Working ≤1100℃
    Temperature Zone 150*200*150mm(3 Zones)
    independent temperature control
    with
    Heating Element Electric mo with wire
    Thermocouple K type
    Temperature
    Accuracy
    Control ±1℃
     
     
     
     
    Tube Size
    160x 1000mm (OD x minimum L)
    150mm(ID±2mm) Thickness 5mm
    Material:Quartz tube
     
    quarz tube
    Temperature Control PID  automatic  control  via  SCR power
    control
    Heating curves 30 steps programmable
     
    Safety Element
    Over-temperature Alarm Over-current protection Power off when door open
    Thermocouple broken indication
     
     
     
     
     
    Vacuum Flange
    One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a
    PSV.
     
     
    Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release high
    pressure.
    3 way Valve One for KF25 vacuum valve
    Second for 1/8” valve
    Third for 1/2” valve(to bubbler)
    Power Supply 380V 50/60Hz 3 phases
    Output Power Base on the final design
     
    Part 2 Vacuum pump system
     
     
     
     
    Vacuum Pump


    VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valve
     
    Vacuum rate: -0.1mpa(Relative
    pressure)
     
    Part 3 4 way Mass flow meters
     
     
     
     
     
     
     
     
     
     
     
    4 Way Mass Flow Meters (Computer control)
    Four precision mass flow meters :
    MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. Ar
    4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually
    MFC could be controlled on the computer.
    l Mixing gas will be pre-heating at 100-200C before flow into the furnace tube.
    l SS tube with sprial shape
    l (For reference only)
     
    cvd  
     
    cvd tube furnace

    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan