Custom CVD Furnace System_Zhengzhou Kejia Furnace

Custom CVD Furnace System

Model：KJ-T1200CVD

Description：

Part I: Standard Parts heating
Tube Furnace Display LED Display(Computer Control)
Max. Temperature 1200
Continuous
Temp. Working ≤1100℃
Temperature Zone 150*200*150mm(3 Zones)
independent temperature control

Part I: Standard Parts heating
Tube Furnace	Display		LED Display(Computer Control)
	Max. Temperature		1200
	Continuous Temp.	Working	≤1100℃
	Temperature Zone		150200150mm(3 Zones) independent temperature control	with
	Heating Element		Electric mo with wire
	Thermocouple		K type
	Temperature Accuracy	Control	±1℃
	Tube Size		160x 1000mm (OD x minimum L) 150mm(ID±2mm) Thickness 5mm
			Material:Quartz tube
	Temperature Control		PID automatic control via SCR power control
	Heating curves		30 steps programmable
	Safety Element		Over-temperature Alarm Over-current protection Power off when door open Thermocouple broken indication
	Vacuum Flange		One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a PSV. Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release high pressure.
	3 way Valve		One for KF25 vacuum valve Second for 1/8” valve Third for 1/2” valve(to bubbler)
	Power Supply		380V 50/60Hz 3 phases
	Output Power		Base on the final design

Part 2 Vacuum pump system
Vacuum Pump		VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valve Vacuum rate: -0.1mpa(Relative pressure)
Part 3 4 way Mass flow meters
4 Way Mass Flow Meters (Computer control)	Four precision mass flow meters : MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. Ar 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually MFC could be controlled on the computer. l Mixing gas will be pre-heating at 100-200C before flow into the furnace tube. l SS tube with sprial shape l (For reference only)