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  • Large Diameter CVD Tube Furnace


    Continuous Temp:

    Chamber/Tube size:


    Brief Introduction:  
        KJ-T1200 Large Diameter CVD Tube Furnace is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump  and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
    Technical Parameter:

    Model KJ-T1200
    Part I: Standard Parts
    Tube Furnace
    Display LCD Touch Screen
    Chamber Split type and upper part can be opened
    Continuous Woking Temp. ≤1100℃
    Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
    Temperature Zone 500mm
    Heating Element Resistance wire with Mo
    Thermocouple K type
    Temperature Control Accuracy ±1℃
    Tube Size 200mm OD X Length 1200 mm
    Material: Quarz Tube 
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Vacuum Flange Stainless Steel vacuum flange with valve 
    Power 380V, 50 Hz, three phases at max.20KW
    Vacuum Pump  Rotary Vane Vacuum Pump
    Flow rate: 4L/S
    The rotary vane vacuum pump will be designed into a cart with wheel.
    Vacuum Degree: 10pa (in cold and empty state)
    Mass Flow Meters
    LCD Touch Screen
    Three precision mass flow meters :
    MFC 1: Gas flow range from 0~100 sccm
    MFC 2: Gas flow range from 0~100 sccm
    MFC 3: Gas flow range from 0~100 sccm
    (or according to your requirement)
    One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
    Digital Vacuum Gauge Pirani digital vacuum gauge


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