1400℃ Three-Zone CVD System comprises a KJ-T1400 single zone tube furnace, a four-channel gas-mixing unit with mass flow meters and a set of vacuum pumps.
|Product name||1400℃ High-Vacuum Chemical Vapor Deposition (CVD) System|
|Tube Furnace||Max. Temperature||1400℃|
|Heating Rate||20℃/min (Suggestion 10℃/min)|
|Heating Zone Length||300mm|
|Heating Element||Silicon Carbide SiC heating rods|
|Temperature Sensor||S-type thermocouple|
|Temperature Control Accuracy||±1℃|
|Tube||Alumina ceramic tube
Φ50, 60, 80mm available
|Temperature Controller||PID, Intellectual, 30-segment programmable|
|Sealing||Flanges made of 304SS
Gas valve on left flange
Vacuum angle valve with KF25 connector on the right flange
Note: Standard flange, KF flange and hinge flange are available.
|Power||Single phase, 220V, 50Hz.
|Vacuum pump unit||Vacuum pump||0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.|
|Pressure Gauge||Digital Pressure Gauge with high accuracy|
|Gas-Mixing Unit||Manual Intellectual Control, Led screen.
Each channel can be used for different gas.
Measurement range: 0-500sccm adjustable.
Four manually-controlled stainless steel valves installed on the left side, three inlets, one outlet.
Connection: Ferrule screw.
|Certificate||ISO and CE.|
|Chiller (Optional)||Be used to cool the tube and vacuum pump.|
|Notes||Pressure higher than 1.02Mpa will break the tube.
Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.
No vacuum condition is allowed when the temperature is higher than 1000℃.
Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.
If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
|Warranty||One year with lifetime technical support.|
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