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  • 1200℃ double-tube slide CVD system

    Model:KJ-1200T

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Product introduction:
       This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.
    technical parameter:

    product name

    1200℃ double-tube slide CVD system

    The first part: 1200 degree chute double tube double temperature zone tube furnace

    Product number

    1200 degree chute tube furnace

    Furnace tube size

    Double quartz tube

    Outer tube: OD 100 x ID 96 x 1400 mm

    Inner tube: OD 80 x ID 75 x 1800 mm

    Heating zone

    220+220mm

    Power supply

    230V, single phase, 50HZ

    power

    4.0 kw

    Heating element

    Resistance wire

    Heating rate

    0-20°C/min

    Thermocouple

     Type K

    Part 2: Water cooling system

    Flange

    1. Water chiller CW-3000

    2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube.

    Part Three Vacuum System

    Vacuum system

    1. Anticorrosive digital display vacuum gauge   

    2. VRD-16 rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box

    Part Four Air Mixing System

    Mass flowmeter

    Range:

    MFC 1: 0~10 sccm  

    MFC 2: 0~200 sccm  

    MFC 3: 0~10 slm  

    MFC 3: 0~10 slm  

    .......

     
    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan