Tel Number
180-3717-8440
Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>



Model:KJ-TCVD1200
Description:
In the fields of semiconductor manufacturing, automotive industry, general machinery, digital products, light-emitting diodes, etc., they provide these products with better wear resistance, corrosion resistance and other properties.


Precision temperature control: Adopting multi-stage program temperature control (such as 30-stage curve) and corundum furnace, the temperature field uniformity is high (such as ±0.5°C/24h), and the heating rate is fast.

Multi-gas path design: integrated 2-5 gas mixing system, supporting float/mass spectrometer flowmeter to accurately control the reaction gas ratio.

High efficiency vacuum: the ultimate vacuum reaches 10⁻³Pa, reducing impurity interference and improving carbon tube purity.

Energy saving and consumption reduction: The third-generation horizontal furnace has lower energy consumption than the traditional tube furnace, the constant temperature time is shortened by 50% (45-60 minutes), and the purity after pickling is >98%.
| Tube Furnace Part | |
| Product model | KJ-TCVD1200 |
| Maximum temperature | 1200℃ |
| Working temperature | ≦1100℃ |
| Heating zone | 200mm Customizable |
| Heating element | Molybdenum alloy resistance wire |
| Heating rate | 0-20ºC/min, 10C/min recommended |
| Tube size | Diameter 50*600mm Customizable |
| Tube material | High-purity quartz tube |
| Tube plugging | Metal screen on the left, detachable |
| Temperature control system | 7-inch touch screen control |
| Temperature control protection | With over-temperature and broken couple protection function |
| Temperature measuring element | N-type thermocouple |
| Temperature control accuracy | ±1℃ |
| Furnace material | Polycrystalline fiber material |
| Flange | Stainless steel sealed water-cooled flange, quartz lens on the right flange end |
| Sealing system | O-ring extrusion seal is used between the furnace tube and the flange; |
| Dynamic seal is used between the rotating motor and the flange | |
| Furnace structure | Outer shell is made of stainless steel, double-layer liner structure, and the furnace door is opened manually |
| Furnace shell temperature | ≤55℃ |
| Rotation System | |
| Speed | 200r/min |
| Connection method | Coupling connection with shaft dynamic seal transmission |
| Vacuum System | |
| Name | DRV10 rotary vane pump 2L/S |
| Main parameters | Ultimate vacuum ≤10Pa |
| Vacuum gauge | Resistance gauge + film gauge |
| Pressure control | Working pressure 0.04-0.06Mpa |
| Filter | Vacuum pump equipped with special filter device |
| Pressure gauge | Mechanical pressure gauge |
| Gas System | |
| Air path | One nitrogen |
| Flow control | Touch screen display |
| Flow range | 500SCCM |
| Control accuracy | ±1.5%F.S |
| Inlet interface | 1 manual valve + 1 solenoid valve |
| Exhaust interface | 1 manual valve |
E-mail:web@kejiafurnace.com
Tell:+(86) 18037178440
Whatapp:+(86) 180-3717-8440
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
web@kejiafurnace.com
YouTuBe