Tel Number
180-3717-8440
Model:KJ-TCVD1100-S60CK2
Description:
The CVD system mainly consists of: 1200-degree dual-temperature zone slide tube furnace, high vacuum molecular pump vacuum system, 6-way mass flow meter gas supply system and other connectors;
Product name | Dual temperature zone slide type CVD System |
1200 double temperature zone slide tube furnace | |
Chamber type | open-type |
Furnace sliding | The material can be quickly cooled and heated by sliding left and right on the guide rail. |
Chamber material | Alumina refractory fiber |
Heating element | Molybdenum heating wire |
Max.temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | ≤20℃(Suggest:15℃/min) |
Heating zone | Double zone |
Total length of temperature zone | 200+200mm |
Furnace tube material | High purity quartz |
Furnace tube diameter | 60mm |
Sealing method | A set of stainless steel vacuum flanges (including sealing silicone rings). One end uses a quick-connect flange to facilitate the entry and exit of materials, and reserves air inlets and air outlets. |
control mode | Multi-stage intelligent PID program temperature control |
Temperature measuring element | K type thermocouple |
Call the police | With overtemperature and disconnection alarm |
Power supply | 220V 50HZ |
Air supply system KJ-6Z | |
Operating Voltage | 220V/50HZ |
Maximum output power | 18W |
Operating temperature | 5--45℃ |
Maximum air pressure | 3*106Pa |
gas channel | Can connect to 6 gas sources at the same time The mass flow meter and gas mixing tank are installed in the mobile box |
flow meter | Mass flow meter (other ranges are optional and do not affect the price) |
A channel range | 0~300SCCM |
B channel range | 0~300SCCM |
C channel range | 0~300SCCM |
D channel range | 0~300SCCM |
E channel range | 0~300SCCM |
F channel range | 0~300SCCM |
Air line pressure | -0.1~0.15 MPa |
Shut-off valve | Stainless steel material |
Gas connection pipe | stainless steel pipe |
Vacuum system (including stainless steel bellows and related connection accessories) | |
Vacuum pump + digital vacuum gauge | Molecular pump unit and corresponding connecting pipe fittings 220V/50HZ Pulleys are installed at the bottom for easy movement, and a high-temperature furnace can be placed above it. The ultimate vacuum degree can achieve 6.67*10-3pa. |
Random Accessories | 1 quartz furnace tube, 1 set of vacuum flange, 2 furnace tube plugs, O-ring seals, 1 pair of protective gloves, 1 crucible hook, 3 meters of PTFE tube, 2 Allen wrenches, and 1 instruction manual. |
Tel Number
180-3717-8440
web@kejiafurnace.com
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