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Dual temperature zone slide type CVD System
  • Dual temperature zone slide type CVD System
  • Dual temperature zone slide type CVD System
  • Dual temperature zone slide type CVD System
  • Dual temperature zone slide type CVD System
  • Dual temperature zone slide type CVD System

    Model:KJ-TCVD1100-S60CK2

    Description:

    The CVD system mainly consists of: 1200-degree dual-temperature zone slide tube furnace, high vacuum molecular pump vacuum system, 6-way mass flow meter gas supply system and other connectors;

    Introduction to CVD system:
    The CVD system mainly consists of: 1200-degree dual-temperature zone slide tube furnace, high vacuum molecular pump vacuum system, 6-way mass flow meter gas supply system and other connectors;

    Main feature:
    1. The furnace body adopts an upper and lower "split-close" structure, making it easy to take and place the furnace tube;
    2. The interior of the furnace is designed with a convection grid, and the air flow inside the furnace body can easily form up-and-down convection circulation, which is beneficial to furnace temperature balance and uniform temperature field.
    3. The entire furnace body adopts a double-layer inner tank structure with an air gap in the middle. Even if the temperature of the furnace is as high as 1000°C, the surface of the furnace body can still be touched safely without feeling hot.
    4. The heating elements of the furnace are evenly distributed axially in a circumferential shape, and the heating elements have been embedded and solidified, so that the heat energy radiates evenly and gently during heating.
    5. The gas flow is accurately measured and controlled using a touch screen 6-way mass flow controller.
    6. The high vacuum molecular pump unit can quickly replace gas in the furnace tube and achieve high vacuum in the tube.

     

    Technical Parameters
    The main technical parameters:
    Product name Dual temperature zone slide type CVD System
    1200 double temperature zone slide tube furnace
    Chamber type open-type
    Furnace sliding The material can be quickly cooled and heated by sliding left and right on the guide rail.
    Chamber material Alumina refractory fiber
    Heating element Molybdenum heating wire
    Max.temperature 1200℃
    Working temperature ≤1100℃
    Heating rate ≤20℃(Suggest:15℃/min)
    Heating zone Double zone
    Total length of temperature zone 200+200mm
    Furnace tube material High purity quartz
    Furnace tube diameter 60mm
    Sealing method A set of stainless steel vacuum flanges (including sealing silicone rings).
    One end uses a quick-connect flange to facilitate the entry and exit of materials, and reserves air inlets and air outlets.
    control mode Multi-stage intelligent PID program temperature control
    Temperature measuring element K type thermocouple
    Call the police With overtemperature and disconnection alarm
    Power supply 220V    50HZ
    Air supply system KJ-6Z 
    Operating Voltage 220V/50HZ
    Maximum output power 18W
    Operating temperature 5--45℃
    Maximum air pressure 3*106Pa
    gas channel Can connect to 6 gas sources at the same time
    The mass flow meter and gas mixing tank are installed in the mobile box
    flow meter Mass flow meter (other ranges are optional and do not affect the price)
    A channel range 0~300SCCM
    B channel range  0~300SCCM
    C channel range 0~300SCCM
    D channel range 0~300SCCM
    E channel range 0~300SCCM
    F channel range  0~300SCCM
    Air line pressure -0.1~0.15 MPa
    Shut-off valve Stainless steel material
    Gas connection pipe stainless steel pipe
     Vacuum system (including stainless steel bellows and related connection accessories)
    Vacuum pump + digital vacuum gauge Molecular pump unit and corresponding connecting pipe fittings
    220V/50HZ
    Pulleys are installed at the bottom for easy movement, and a high-temperature furnace can be placed above it. The ultimate vacuum degree can achieve 6.67*10-3pa.
    Random Accessories 1 quartz furnace tube, 1 set of vacuum flange, 2 furnace tube plugs, O-ring seals, 1 pair of protective gloves, 1 crucible hook, 3 meters of PTFE tube, 2 Allen wrenches, and 1 instruction manual.
     
    sliding tube furnace

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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