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Chemical vapor deposition system
  • Chemical vapor deposition system
  • Chemical vapor deposition system
  • Chemical vapor deposition system
  • Chemical vapor deposition system
  • Chemical vapor deposition system

    Model:

    Description:

    The main technical parameters:
    Product name Chemical vapor deposition system Model KJ-TCVD1200-S80LK1 High temperature tube furnace

    The main technical parameters:
     
    Product name Chemical vapor deposition system
    Model KJ-TCVD1200-S80LK1
    High temperature tube furnace
    Hearth mode open type
    display mode LED
    Chamber material Alumina refractory fiber
    Heating element Alloy heating wire
    Max.temperature 1200℃
    Working temperature ≤1100℃
    Heating rate 0-10℃/min
    Heating zone Single zone
    Temperature zone length 440mm
    Furnace tube material High purity quartz
    Furnace tube outer diameter 80mm
    The length of the furnace tube is approx. 1000mm(Subject to actual supply)
    Sealing method Removable stainless steel sealing flange. Easy to disassemble and assemble, good sealing
    control mode Intelligent PID control with multi-stage programmable temperature control and self-tuning function
    Temperature curve Multiple "time-temperature curves" can be set arbitrarily
    Call the police With overtemperature and disconnection alarm
    Temperature measuring element K type thermocouple
    Power supply 220V 50Hz
    Heating power approx. 4KW
    Air supply system
    flow meter Three-way mass flow meter (range can be selected according to needs)
    A way range nitrogen 0~1000SCCM
    B road range methane 0~500SCCM
    C Road Range Ethylene 0~500SCCM
    Mixed air Contains a precision air mixing tank
    Power supply 220V  50HZ
    Working temperature 5℃-45℃
     Vacuum system (including stainless steel bellows and related connection accessories)
    Vacuum pump pumping speed 2L/S pumping speed mechanical rotary vane pump, bellows and related connectors, ultimate vacuum can achieve 10pa
    Digital vacuum gauge Digital resistance vacuum gauge integrated into the movable air supply system box
    Regulation of use resistance gauge
    Measuring range 1.0×105—1.0×10-1  (Pa)
    measurement accuracy ±10%
    zero drift ±2%
    Number of measurement channels 1 channel
    Display the number of channels 1 window
    Display method Five-digit LED digital display, using scientific notation, for example: 1.2E-1, expressed as 1.2×10-1Pa
    power supply AC/220V/50Hz/15W
    The overall dimensions of the whole machine are approx. Including vacuum pump, width 1000*depth 600mm*height 1000mm
    After-sales service ●Warranty period: 15 months after leaving the factory or 12 months after acceptance, whichever comes first (excluding consumable parts such as silicon molybdenum rods, silicon carbon rods, resistance wires and man-made damage), lifetime warranty, free technical guidance on installation and Equipment debugging services. When the warranty expires, renewal services will be provided.
    ● General faults will be resolved within 24 hours, and major faults will be resolved within 72 hours. In special circumstances, technicians can go to the site to deal with the problem.
     

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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