This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature o
|Heating System(Tube Furnace)|
|Max. temperature||1700 ℃|
|Tube Material||High Quality alumina tube|
|Hot zone length||220+220+220mm(There will be a gap between each zones)|
||● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
● 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
● Over temperature protection and alarm allows for operation without attendant.
|Vacuum Flange||Stainless Steel vacuum flange with valve.|
|Working voltage||220V 50Hz|
|4 Channel Mass Flow Meter||Four precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Control range from 0~200 sccm
MFC3: Control range from 0-500sccm
MFC4: Control range from 0~200 sccm
(or according to your requirement)
One gas mixing tank is installed on bottom case with liquid release valve
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing.
|Vacuum Pump +Vacuum Gauge System|
|Vacuum Pump+Vacuum Gauge||Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State)|
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