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3 temperature zone tube furnace CVD system
  • 3 temperature zone tube furnace CVD system
  • 3 temperature zone tube furnace CVD system
  • 3 temperature zone tube furnace CVD system
  • 3 temperature zone tube furnace CVD system
  • 3 temperature zone tube furnace CVD system

    Model:KJ-TCVD1600-L80LB3

    Description:

    This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature o

    Brief Introduction:
    This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature of this furnace can reach 1600℃, and the vacuum degree can reach 10pa.

    Main Features:
    1. The heating element is made of high-quality MoSi2, and the furnace is made of ceramic fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and energy-saving effect is obviously better than that of domestic fiber materials.
    2. Over temperature alarm and power off, leakage protection, safe and reliable operation.
    3. Independent temperature controller. 30-level programmable temperature.

     
    Heating System(Tube Furnace)
    Max. temperature 1700 
    Working temperature 1600
    Display LED display
    Tube size 80mm(OD)
    Tube Material High Quality alumina tube
    Hot zone length 220+220+220mm(There will be a gap between each zones)
    Heating Element MoSi2
    Heating rate 0-5℃/min
    Temperature control
     
    ● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
    ● 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
    ● Over temperature protection and alarm allows for operation without attendant.
    Thermocouple
    1. 3pcs thermocouple(Both measurement & temperature control function) located in the middle of the each hot zones(out side the tube)
    2. 1pcs thermocouple(Only measure the temperature) located inside the tube.
    Temperature accuracy ±1℃
    Furnace structure
    1. Double layer steel casing with dual cooling fan, temperature of furnace shell below 60 oC.
    2. Non-Splitable door design.
    Vacuum Flange Stainless Steel vacuum flange with valve.
    Working voltage 220V 50Hz
    Max. Power 6KW
    Gas System
    4 Channel Mass Flow Meter Four precision mass flow meters :
    MFC 1: Gas flow range from 0~100 sccm
    MFC 2: Control range from 0~200 sccm
    MFC3: Control range from 0-500sccm
    MFC4: Control range from 0~200 sccm
     (or according to your requirement)
    One gas mixing tank is installed on bottom case with liquid release valve
    4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing.
    Vacuum Pump +Vacuum Gauge System
    Vacuum Pump+Vacuum Gauge Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State)
     
    tube furnace CVD system

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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