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Rocker type integrated control PECVD equipment
  • Rocker type integrated control PECVD equipment
  • Rocker type integrated control PECVD equipment
  • Rocker type integrated control PECVD equipment
  • Rocker type integrated control PECVD equipment
  • Rocker type integrated control PECVD equipment

    Model:KJ-PECVD

    Description:

    Kejia high vacuum PECVD equipment has an integrated control system. It can be operated by rocker-type touch screen. It is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in th

    Product description:
    Kejia high vacuum PECVD equipment is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.
     
    Main features of PECVD system:
    1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.
    2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.
    3. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.
    4. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).
     
    Main technical parameters of the equipment:
    Product name High vacuum PECVD system
    Model number KJ-PECVD
    Part I Slide Rail Tube Furnace Part
    Furnace tube size Φ25mmX1600mm (final length depends on final design.)
    Furnace tube material Quartz tube
    Heating zone 200+200mm (dual zone)
    Operating temperature ≤1100°C
    Maximum temperature 1200°C for limiting
    Temperature control method K-type thermocouple
    way to control Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to use
    Temperature control accuracy ±1℃
    Temperature control protection With over-temperature and burnout protection function
    Heating rate recommended ≤10ºC/min, max. 20ºC/min
    Heating element resistance wire
    Operating Voltage AC 220V single-phase 50HZ/60HZ (circuit voltage users can choose to customize)
    Heating power 4KW
    Furnace material Alumina polycrystalline fiber
    Furnace structure The furnace body has a slide rail, which can realize rapid heating and cooling
    Vacuum Flange Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed
    vacuum flange 
    Sealing system The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.
    Case Carbon Steel or Stainless steel housing
    Optional Auxiliary cooling fan
    Part II Vacuum System Part
    name Vacuum system
    The main parameters 1. Using Chinese brand high vacuum molecular pump set, the ultimate vacuum degree can reach 6.7x10-3pa (In empty and cold state)
    2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;
    3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracy
     
    Part III Gas supply system part
    Name Four-way mass flow meter
    The main parameters Four-channel precision mass flow meter: touch screen control, digital display, automatic control. 
     

    1.Flow range: MFC 1-MFC3: 0-1000sccm adjustableMFC1: CH4 0-10sccm
    MFC2: H2 0-200sccm
    MFC3:0-200sccm
    MFC4: 0-300sccm
    Control accuracy: +-1.5% F.S.
    2. A mixing tank
    3. 4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;
    4. Air inlet and outlet: 4 in and 1 out
    Flow control: LCD Touch screen
    Note:Liquid or corrosion gas not supported.
    Part IV Plasma power supply part
    Name 500W plasma power supply
    Power range 0-500W (continuously adjustable)
    working frequency 13.56MHZ+0.005%
    Operating mode Continuous output
    RF output impedance interface N-type, female (50Ω)
    Power stability ≤2W
    Maximum reflected power 70W
    Power protection settings DC over current protection, power amplifier over temperature protection, reflected power protection
    Supply voltage/frequency Single-phase AC (187V-253V) 50-60HZ
    cooling method Air cooling
    Certification ISO certification, CE certification
    After-sales service One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)

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    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

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