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  • Compact Auto PECVD Furnace with Quartz Tube,MFC Gas Mixing Station and Vacuum Pump


    Continuous Temp:

    Chamber/Tube size:


    1. Introduction to the system
          Plasma-enhanced chemical vapor deposition (PECVD) technology is a series of preparation technology that uses glow discharge (plasma) to chemically react gaseous substances containing thin films to achieve thin film technology growth. Our company designs and manufactures this equipment according to the experimental requirements to meet the needs of various thin film researches.
    2. Main Functions and Features
    2.1 It adopts professional heating elements, and the furnace heat preservation material adopts polycrystalline fiber material, which has good heat preservation performance, durability, high tensile strength, no impurities, high purity, and energy saving effect is obviously better than domestic fiber materials.
    2.2 The whole furnace body adopts a double-layer inner liner structure with an air gap in the middle. Even if the furnace temperature reaches the highest point, the surface of the furnace body can still be touched safely without hot feeling.
    2.3 The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of the same traditional electric furnace, which is energy-saving and environmentally friendly.
    2.4 Over-temperature alarm and power off, leakage protection, safe and reliable operation, with multiple protection functions.
    2.5 The PECVD tube furnace system consists of: RF power supply, sliding tube furnace, mass flow meter gas mixing station, vacuum system and pressure control system
    3.Technical Parameter 
    Item Name PECVD System
    RF Power
    Output Power 5 -500W adjustable with ± 1% stability
    RF frequency 13.56 MHz ±0.005% stability
    Reflection Power 200W max.
    Matching Automatic
    RF Output Port 50 Ω, N-type, female
    Noise <50 dB.
    Cooling Air cooling.
    Power 220V, 50Hz
    Sliding Tube Furnace Rail Manual or Automatically
    Hot Zone 300mm
    Tube Size 60mm x1600mm OD*L
    Tube Material High Purity Quartz Tube(SiO2 ≥ 99.99%)
    Working Temp. ≤1100℃
    Temperature Control PID automatic control via SCR power control
    Temp. Control Accuracy ±1℃
    Heating Rate Suggest: 0~10℃/min
    Heating Element Resistance Wire
    Rated Voltage 220V 50Hz Single Phase
    Thermocouple K type
    Structure Double shell structure with air cooling system
    Vacuum Flange One of flange is with 1/4" valve gas inlet, 60mm to KF50 flange. The other side is with pressure control valve, a pneumatic pressure relief valve and an air release valve.
    Mass Flow Meter Gas Mixing Station Four Channels precision proton flowmeter:
    Measurement accuracy: ±1.5% F.S.
    Flow rate range: 0~200 sccm
    Flow rate range: 0~200 sccm
    Flow rate range: 0~200 sccm
    Flow range: 0~500 sccm
    Adjust the gas flow through the touch screen
    Vacuum System Rotary vane vacuum pump,max. vacuum degree: 1pa in the cold state of the empty furnace,
    Vacuum gauge: Imported digital display vacuum gauge displays the vacuum degree in real time, with high accuracy.
    Pressure Control System Controllable Range: -15Kpa to 15Kpa (Can also customize according to your customer’s requirement)
    Automatic Control
    LCD Touch Screen
    The touch screen interface integrates and controls the furnace, vacuum pump, mass flow meter and RF power supply. The furnace part needs to set the temperature-time curve first. The integrated control part can control the start and stop of the temperature curve, vacuum degree, gas flow, radio frequency power and radio frequency start and stop, pressure relief valve, etc.

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