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  • Plasma Enhanced Chemical Vapor Deposition (PE-CVD) System

    Model:KJ-T1200-S6030-PE

    Continuous Temp:

    Chamber/Tube size:

    Description:

    Specific Introduction:
        This device is equipped with RF plasma source for plasma enhancement. The slide-type design enable you to move the constant high temperature required by the experiment to the samples during operation, so that the sample can get a rapid heating rate, and the high-temperature tube furnace can also be directly pushed away from the sample and the sample will be exposed in the  room temperature for a fast cooling rate. The regulating valve is very simple and practical for low-pressure CVD. It has good process repeatability and is suitable for graphene growth process and CVD experiment requiring rapid temperature rise and fall.

    Range of Application:
        This PECVD system is mainly used in universities and research institutes for vacuum coating, nano-film material preparation, growth of thin film graphene, metal film, ceramic film, composite film, etc., and can also be used for plasma cleaning and etching.

    parameters:

    Product name

    Plasma Enhanced Chemical Vapor Deposition (PE-CVD) System

    Model

     KJ-T1200-S6030-PE

    Tube Furnace

    Type

    Railway type

     

    Max. Temperature

    1200℃

     

    Working Temperature

    ≤1100℃

     

    Heating Rate

    20℃/min (Suggestion 10℃/min)

     

    Heating Zone Length

    300mm (Single Zone)

     

    Heating Element

    0Cr27Al7Mo2 resistance wire

     

    Temperature Sensor

    K-type thermocouple

     

    Temperature Control Accuracy

    ±1℃

     

    Tube

    Quartz tube

    Φ50, 60, 80mm available

     

    Temperature Controller

    PID automatic control with 30 programmable segments for precise control

     

    Sealing

    Flanges made of 304SS

    Gas valve on left flange

    Vacuum angle valve with KF25 connector on the right flange

    Note: Standard flange, KF flange and hinge flange are available.

     

    Power Supply

    Single phase, 220V, 50Hz.

     

    Power

    Power 3kW

    Vacuum pump unit

    Vacuum pump

    (With movable box)

    Imported vacuum pump

    1.5*10-3Torr

    (Better vacuum degree 0.001pa can be achieved with a mechanical vacuum pump and a diffusion vacuum pump.)

     

    Pressure Gauge

    Digital Pressure Gauge with high accuracy

    Plasma RF Power Supply

    Output Power Range

    5-300W Adjustable

    200w/300w/500w/1000w available.

     

    RF frequency

    13.56 MHz ±0.005% stability

     

    Reflection Power

    200W max

     

    Matching

    Automatic

     

    RF Output Port

    50 Ω, N-type, female

     

    Noise

     <50 dB

     

    Cooling

    Fans

     

    Power

    208-240VAC, Single Phase, 50/60Hz

    Gas-Mixing Unit with mass flow meters

    Three precise mass flow meters (0.02% accuracy) with LED displays are installed on the front panel to control gas flow rate manually.

    One gas mixing tank is installed on the bottom case.

    MFC 1: Gas flow range from 0~100 SCCM

    MFC 2: Control range from 0~200 SCCM  

    MFC 3: Control range from 0~500 SCCM

    Gas inlet fitting: four 1/4NPS.

    Gas outlet fitting: four 1/4NPS.

    Power: 185-220VAC 50/60Hz

    4 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.

    Chiller (Optional)

    Be used to cool the tube and vacuum pump.

    Notes

    Pressure higher than 1.02Mpa will break the tube.

    Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.

    No vacuum condition is allowed when the temperature is higher than 1000℃.

    Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.

    If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.

    Warranty

    One year with lifetime technical support.


    Products
    Inquiry

    Tel Number

    181-3719-5600

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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