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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Structure:
Plasma enhanced chemical vapor deposition (PECVD) is a thin film growth technology that uses glow discharge (plasma) to react thin films containing gaseous substances. Our company designed this equipment according to experimental requirements, and the equipment is designed to meet the needs of various thin film research. The PECVD is equipped with spray towers and activated carbon boxes to meet the needs of exhaust gas treatment.
Technical Parameters:
More details picture:
Plasma enhanced chemical vapor deposition (PECVD) is a thin film growth technology that uses glow discharge (plasma) to react thin films containing gaseous substances. Our company designed this equipment according to experimental requirements, and the equipment is designed to meet the needs of various thin film research. The PECVD is equipped with spray towers and activated carbon boxes to meet the needs of exhaust gas treatment.
Technical Parameters:
| Model | KJ-T1200-PECVD system | |
| Tube Furnace Part |
Display | LED |
| Chamber | Split type and upper part can be opened | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 300mm | |
| Heating Element | Resistance Wire With Mo | |
| Thermocouple | N type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 100 x 1500mm (OD x L) Approx. | |
| Material:High Purity Quartz | ||
| Temperature Control | PID automatic control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange |
Stainless Steel vacuum flange with valve | |
| Plasma RF Power supply |
Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching |
Automatic |
|
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
| Vacuum Pump |
Diffusion Pump System | Ultimate vacuum:10-5~10-6 Torr. And Inside tube vacuum: 10-3 Torr~10-4 Torr. Include Rotary pump, Diffusion pump, Vacuum gauge, Water cooler,Connecting pipe,Box,Valve. |
| Mass Flow Meters (LCD Touch Screen) |
Two precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Nitrogen : Gas flow range from 0~500sccm MFC 2 for Argon : Gas flow range from 0~500sccm One gas mixing tank is installed on bottom case with 2 stainless steel needle valves is installed on left side of bottom case to control 2 type gases mixing manually. |
|
| Exhaust gas treatment equipment | 2 sets Spray tower 2sets Activated carbon box 1set Centrifugal blow |
|
More details picture:
