Plasma enhanced chemical vapor deposition (PECVD)

Model：KJ-T1200-PECVD system

Description：

Plasma enhanced chemical vapor deposition (PECVD) is a thin film growth technology that uses glow discharge (plasma) to react thin films containing gaseous substances.

Structure:
Plasma enhanced chemical vapor deposition (PECVD) is a thin film growth technology that uses glow discharge (plasma) to react thin films containing gaseous substances. Our company designed this equipment according to experimental requirements, and the equipment is designed to meet the needs of various thin film research. The PECVD is equipped with spray towers and activated carbon boxes to meet the needs of exhaust gas treatment.

Technical Parameters:

Model		KJ-T1200-PECVD system
Tube Furnace Part	Display	LED
	Chamber	Split type and upper part can be opened
	Continuous Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	300mm
	Heating Element	Resistance Wire With Mo
	Thermocouple	N type
	Temperature Control Accuracy	±1℃
	Tube Size	100 x 1500mm (OD x L) Approx.
	Tube Size	Material:High Purity Quartz
	Temperature Control	PID automatic control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve
Plasma RF Power supply	Output Power	5 -500W adjustable with ± 1% stability
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max.
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB.
	Cooling	Air cooling.
Vacuum Pump	Diffusion Pump System	Ultimate vacuum:10-5~10-6 Torr. And Inside tube vacuum: 10-3 Torr~10-4 Torr. Include Rotary pump, Diffusion pump, Vacuum gauge, Water cooler,Connecting pipe,Box,Valve.
Mass Flow Meters (LCD Touch Screen)	Two precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Nitrogen : Gas flow range from 0~500sccm MFC 2 for Argon : Gas flow range from 0~500sccm One gas mixing tank is installed on bottom case with 2 stainless steel needle valves is installed on left side of bottom case to control 2 type gases mixing manually.
Exhaust gas treatment equipment	2 sets Spray tower 2sets Activated carbon box 1set Centrifugal blow