Position:Home > Products > CVD/PECVD System > CVD Graphene and Nanotube Growth Furnace
Graphene cvd high vacuum system
  • Graphene cvd high vacuum system
  • Graphene cvd high vacuum system
  • Graphene cvd high vacuum system
  • Graphene cvd high vacuum system
  • Graphene cvd high vacuum system

    Model:KJ-OTF-1200-80

    Description:

    KJ-OTF-1200-80 is an idea system for graphene growth, it consists of one split tube furnace with 80mm diameter and 300mm long hot zone, one quartz tube or alumina tube is available.

    Specific Introduction:
        KJ-OTF-1200-80 is an idea system for graphene growth, it consists of one split tube furnace with 80mm diameter and 300mm long hot zone, one quartz tube or alumina tube is available. Its tube chamber could reach a high vacuum degree of 6.7*10-3Pa under cold state, it is also good choice for vacuum sintering. The gas-rout is specialy designed for N2 gas, H2 gas and CH4 gas. User can also choose other gases according to actual processing technology.

    Product Information:

    Heatings system Display Touch screen
    Chamber Split type
    Max. Temperature 1200℃ for short time
    Continuous Working Temp. ≤1100℃
    Heating Rate Suggestion: 0~15℃/min (max. 20℃/min)
    Temperature Zone 300mm
    Constant Heating Zone 150mm
    Heating Element Resistance Wire with Mo
    Thermocouple K type
    Temperature Control Accuracy ±1℃
    Tube Size 80 x 800mm (OD x L)
    Material:  Alumina 
    Temperature Control PID automatic control via SCR power control
    Heating curves 32 steps programmable
    Vacuum gauge Composite vacuum gage
    Vacuum Flange Stainless Steel vacuum flange with valves and needles
    Power source 220V, 50 Hz, single phase at max.3KW
    Vacuu Pump System Vacuum Pump Group
    Include KF25, KF50 Adpater,bellow for vacuum pump group and mobile cabinet with wheels.
     Ultimate vacuum 6.67*10-3Pa under cold state.
       
    Mass Flow meters(Ar H2 CH4)
     
    Flow scope (20, 30, 50, 100, 200, 300, 500) SCCM
    Accuracy ±1.5 % F.S.
    Repeat accuracy ±1.5 % F.S.
    Response time ≦10sec
    Working pressure difference range 0.1~0.5MPa
    Pressure resistance 3MPa
    Temperature Coefficient Zero: ≤±0.2% F.S./℃; Span: ≤±0.2% F.S./℃
    Working environment temperature 5~45℃
    Input signal 0 V ~ +5.00 V
    Output signal 0 V ~ +5.00 V
      Electric plug form DB15 pin(Female)
      Power +15 V 50 mA
    -15V 200 mA

    Inquiry

    Please leave a message here. We will reply you in 24 hours.

    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

    kejialiuyan