Furnace Structure
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The furnace is consistent with 4 small tube furnace modules with alumina tube 25 OD x 22 ID x 460 L, mm
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Each heating module's temperature is controlled independently up to 1700°C
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Quickly sealed flange, Vacuum gauge, and flowmeter are installed to allows heat treatment under vacuum or flowing gas
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Processing 4 samples with the different temperature at compact space
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Heating Element |
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Working Temperature &
Constant Temperature Zone |
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Continuous Working Temperature 1600° C
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Maximum Working Temperature 1700°C (< 1 hrs)
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Constant temperature zone:
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+/- 1°C within center 30 mm cubic zone
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+/- 5°C within center 60 mm cubic zone
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Processing Tube
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High purity alumina tube with Φ25X L 460 mm, 4 tubes included
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4 flowmeters are included
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The quickly clamped flange of KF25 with mechanical vacuum gauge and needle valves
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Max. Vacuum 10-5 torr by turbopump
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Only one vacuum pump required via a KF25 port. Click the picture below to choose a vacuum pump
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Temperature Control |
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Touch screen precision temperature controller with the protection of over-temperature and Thermal couple broke.
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4 channel heating tube is controlled independently by 30 segments programmable temperature controller
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4 B type Thermal Couple
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PC control software is included, which can control 4 channel heaters by one Laptop
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Heating Rate |
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Temperature Accuracy |
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Quenching Optional |
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The furnace can be upgraded to verticle quenching furnace with a rotatable frame and quenching liquid tank at extra cost
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Power & Working Voltage |
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6 KW, 208 - 240V single phase, 50/60Hz ( if 4 heating modules operation in the same time )
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Three-phase, AC 380V - 460V available upon request.
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Note: Power cable included but without a plug. Please install a plug on your own. You may purchase a plug from your local hardware store or contact us for a compatible plug.
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Compliance |
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CE Certified
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NRTL (UL61010) or CSA certification is available upon request at extra cost.
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Dimension |
1000 L x 650 W x 640 H, mm |
Warranty |
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One year limited warranty with lifetime support
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We reserve the right to upgrade the furnace structure for better performance without notice
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Warning &
Application note |
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Max pressure of this furnace is 7.5 PSI (0.5 atm). You must install a pressure regulator on your gas tank to avoid over-pressured.
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This furnace also can be modified as a larger CVD furnace system with the proper gas delivery system. Please contact us to discuss your special application.
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